Inventor · disambiguated record
Eugene Gantvarg
Also filed as: GANTVARG EUGENE
29 granted patents·3 pending applications·2,693 citations·filing 1995–2009
98Inventor score
Top patents by PatentIndex Score
32 records- 0199US5964653ACarrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Oct 12, 1999·194 cites·18 claims
- 0299US5738574AContinuous processing system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1995·Granted Apr 14, 1998·797 cites·41 claims
- 0398US6146463AApparatus and method for aligning a substrate on a support memberAPPLIED MATERIALS INC·Filed 1998·Granted Nov 14, 2000·412 cites·8 claims
- 0498US5804507ARadially oscillating carousel processing system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1995·Granted Sep 8, 1998·243 cites·84 claims
- 0597US7614939B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2007·Granted Nov 10, 2009·39 cites·6 claims
- 0694US6468353B1Method and apparatus for improved substrate handlingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 22, 2002·78 cites·11 claims
- 0794US5951770ACarousel wafer transfer systemAPPLIED MATERIALS INC·Filed 1997·Granted Sep 14, 1999·138 cites·26 claims
- 0893US6896584B2Method of controlling carrier head with multiple chambersAPPLIED MATERIALS INC·Filed 2003·Granted May 24, 2005·29 cites·18 claims
- 0992US7255632B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2006·Granted Aug 14, 2007·13 cites·11 claims
- 1090US6648740B2Carrier head with a flexible membrane to form multiple chambersAPPLIED MATERIALS INC·Filed 2002·Granted Nov 18, 2003·22 cites·18 claims
- 1189US6086457AWashing transfer station in a system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Jul 11, 2000·71 cites·24 claims
- 1289US6082951AWafer cassette load stationAPPLIED MATERIALS INC·Filed 1998·Granted Jul 4, 2000·104 cites·26 claims
- 1388US6293853B1Conditioner apparatus for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Sep 25, 2001·26 cites·15 claims
- 1488US6287386B1Carousel wafer transfer systemAPPLIED MATERIALS INC·Filed 1999·Granted Sep 11, 2001·77 cites·19 claims
- 1587US8079894B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionTOLLES ROBERT D·Filed 2009·Granted Dec 20, 2011·11 cites·6 claims
- 1687US6277010B1Carrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 21, 2001·18 cites·10 claims
- 1787US6126517ASystem for chemical mechanical polishing having multiple polishing stationsAPPLIED MATERIALS INC·Filed 1998·Granted Oct 3, 2000·63 cites·52 claims
- 1885US6506104B2Carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·16 cites·15 claims
- 1984US6106378ACarrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1999·Granted Aug 22, 2000·44 cites·10 claims
- 2084US6080046AUnderwater wafer storage and wafer picking for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Jun 27, 2000·49 cites·26 claims
- 2182US7097544B1Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2000·Granted Aug 29, 2006·18 cites·30 claims
- 2282US6143127ACarrier head with a retaining ring for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1998·Granted Nov 7, 2000·51 cites·10 claims
- 2380US6374508B1Apparatus and method for aligning a substrate on a support memberAPPLIED MATERIALS INC·Filed 2000·Granted Apr 23, 2002·20 cites·22 claims
- 2479US6036583AConditioner head in a substrate polisher and methodAPPLIED MATERIALS INC·Filed 1997·Granted Mar 14, 2000·39 cites·11 claims
- 2578US6393337B1Method and apparatus for orienting substratesAPPLIED MATERIALS INC·Filed 2000·Granted May 21, 2002·18 cites·20 claims
- 2677US5931724AMechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Aug 3, 1999·40 cites·18 claims
- 2777US5893795AApparatus for moving a cassetteAPPLIED MATERIALS INC·Filed 1997·Granted Apr 13, 1999·50 cites·10 claims
- 2874US7238090B2Polishing apparatus having a troughAPPLIED MATERIALS INC·Filed 2004·Granted Jul 3, 2007·10 cites·5 claims
- 2953US6532866B2Method and apparatus for orienting substratesAPPLIED MATERIALS INC·Filed 2002·Granted Mar 18, 2003·3 cites·9 claims
- 3050US2005142995A1Method of controlling carrier head with multiple chambersFiled 2005·Application pending·0 cites
- 3141US2002170672A1Method and apparatus for improved substrate handlingFiled 2002·Application pending·0 cites
- 3236US2002006322A1Pod door openerAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →