Inventor · disambiguated record
Hirohito Ito
Also filed as: ITO HIROHITO
24 granted patents·6 pending applications·464 citations·filing 1985–2016
96Inventor score
Top patents by PatentIndex Score
30 records- 0194US6559579B2Alumina-based sintered body insulator for spark plugsNGK SPARK PLUG CO·Filed 2000·Granted May 6, 2003·40 cites·6 claims
- 0294US6359679B1Positioning device, exposure device, and device manufacturing methodCANON KK·Filed 2000·Granted Mar 19, 2002·67 cites·48 claims
- 0393US7443619B2Optical element holding apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Oct 28, 2008·22 cites·8 claims
- 0493US5939852AStage feeding deviceCANON KK·Filed 1997·Granted Aug 17, 1999·60 cites·16 claims
- 0591US6028376APositioning apparatus and exposure apparatus using the sameCANON KK·Filed 1998·Granted Feb 22, 2000·114 cites·50 claims
- 0689US7615915B2Spark plugNGK SPARK PLUG CO·Filed 2007·Granted Nov 10, 2009·11 cites·7 claims
- 0787US8562323B2Imprint apparatus and method for producing articleITO HIROHITO·Filed 2010·Granted Oct 22, 2013·7 cites·18 claims
- 0885US6265816B1Spark plug, insulator for spark plug and process for fabricating the insulatorNGK SPARK PLUG CO·Filed 1999·Granted Jul 24, 2001·37 cites·17 claims
- 0984US7710626B2Optical element driving apparatusCANON KK·Filed 2007·Granted May 4, 2010·9 cites·7 claims
- 1083US7771065B2Optical unit and exposure apparatus having the sameCANON KK·Filed 2006·Granted Aug 10, 2010·7 cites·11 claims
- 1178US8625077B2Positioning apparatus, exposure apparatus, and device manufacturing methodITO HIROHITO·Filed 2011·Granted Jan 7, 2014·4 cites·20 claims
- 1277US8618516B2Charged-particle beam exposure apparatus and method of manufacturing articleITO HIROHITO·Filed 2011·Granted Dec 31, 2013·3 cites·6 claims
- 1369US6008882AStage device, method of controlling same, and exposure apparatus using said stage deviceCANON KK·Filed 1997·Granted Dec 28, 1999·28 cites·10 claims
- 1466US8829461B2Scanning apparatus, drawing apparatus, and method of manufacturing articleCANON KK·Filed 2012·Granted Sep 9, 2014·1 cites·13 claims
- 1561US4658647AAccelerometerJAPAN AVIATION ELECTRON·Filed 1985·Granted Apr 21, 1987·21 cites·2 claims
- 1660US7352121B2Spark plugNGK SPARK PLUG CO·Filed 2004·Granted Apr 1, 2008·7 cites·14 claims
- 1759US8981321B2Charged-particle beam exposure apparatus and method of manufacturing articleCANON KK·Filed 2013·Granted Mar 17, 2015·0 cites·7 claims
- 1859US7453623B2Reflecting mirror and exposure apparatus using the sameCANON KK·Filed 2006·Granted Nov 18, 2008·2 cites·15 claims
- 1957US7444817B2Optical micromotor, micropump using same and microvalve using sameCANON KK·Filed 2004·Granted Nov 4, 2008·5 cites·8 claims
- 2057US6688932B2Method for manufacturing spark plug and caulking metallic moldNGK SPARK PLUG CO·Filed 2002·Granted Feb 10, 2004·3 cites·13 claims
- 2153US7738232B2Alignment apparatusCANON KK·Filed 2004·Granted Jun 15, 2010·3 cites·3 claims
- 2248US2009310145A1Positioning apparatus, positioning method, exposure apparatus, device manufacturing method, and methods of manufacturing positioning apparatus and exposure apparatusCANON KK·Filed 2009·Application pending·0 cites
- 2347US2009033901A1Driving apparatus and exposure apparatus using the same and device manufacturing methodCANON KK·Filed 2008·Application pending·0 cites
- 2446US7530795B2Fluid control mechanismCANON KK·Filed 2004·Granted May 12, 2009·2 cites·4 claims
- 2543US2014162191A1Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 2642US2016257060A1Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2016·Application pending·0 cites
- 2741US5976674ATransfer sheet, a method of transferring a figuration therefrom and a ceramic product on which the figuration is printedNGK SPARK PLUG CO·Filed 1997·Granted Nov 2, 1999·6 cites·14 claims
- 2836US6214150B1Method of transfer printing a ceramic spark plug insulatorNGK SPARK PLUG CO·Filed 1999·Granted Apr 10, 2001·5 cites·7 claims
- 2935US2015378342A1Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 3034US2015303025A1Lithography apparatus, and method of manufacturing an articleCANON KK·Filed 2015·Application pending·0 cites
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