Driving apparatus and exposure apparatus using the same and device manufacturing method

Abstract

A driving apparatus for driving an object in a vacuum environment includes a first chamber whose interior is maintained in a vacuum environment, a mover configured to load the object, and a stator, wherein the mover includes one or more magnets, the stator includes one or more coils. The mover moves along an upper surface of the stator in a non-contact state therewith when an electric current is applied to the coil or coils. The upper surface of the stator is a part of a partition wall of the first chamber.

1 . A driving apparatus for driving an object in a vacuum environment, the driving apparatus comprising:
 a first chamber whose interior is maintained in a vacuum environment, the first chamber including a partition wall;   a stator that includes at least one coil, the stator having an upper surface that is part of the partition wall; and   a mover that includes at least one magnet and that is configured to load the object, the mover configured to move along the upper surface of the stator in a non-contact state therewith by applying an electric current to the at least one coil.   
   
   
       2 . The driving apparatus of  claim 1 , wherein the at least one coil is arranged outside of the first chamber. 
   
   
       3 . The driving apparatus of  claim 1 , further comprising a second chamber whose interior is maintained in a vacuum environment, wherein the stator is arranged inside the second chamber. 
   
   
       4 . The driving apparatus of  claim 3 , further comprising a pressure adjustment unit configured to adjust a pressure inside the second chamber. 
   
   
       5 . The driving apparatus of  claim 1 , wherein the partition wall of the first chamber has a bellows connected to the stator. 
   
   
       6 . The driving apparatus of  claim 1 , further comprising:
 a base configured to support the stator; and   a guide unit configured to guide movement of the stator to the base.   
   
   
       7 . The driving apparatus of  claim 1 , further comprising a driving unit configured to drive a mass body so as to exert a force on the stator for resisting a force that the mover exerts on the stator, wherein the driving unit is arranged outside of the first chamber. 
   
   
       8 . An exposure apparatus for exposing a substrate to a pattern formed on an original plate, the exposure apparatus comprising the driving apparatus for driving an object in a vacuum environment of  claim 1 , wherein the object is one of the original plate and the substrate. 
   
   
       9 . A method for manufacturing a device comprising:
 using the exposure apparatus of  claim 8  to expose the substrate to the pattern formed on the original plate; and   developing the exposed substrate.   
   
   
       10 . The driving apparatus of  claim 3 , wherein the second chamber includes a second partition wall, and wherein side and bottom portions of the stator are part of the second partition wall. 
   
   
       11 . The driving apparatus of  claim 10 , further comprising pressure adjustment unit configured to adjust a pressure inside the first chamber and the second chamber. 
   
   
       12 . An exposure apparatus for exposing a substrate to a pattern formed on an original plate, the exposure apparatus comprising the driving apparatus for driving an object of  claim 10 , wherein the object is one of the original plate and the substrate. 
   
   
       13 . A method for manufacturing a device comprising:
 using the exposure apparatus of  claim 12  to expose the substrate to the pattern formed on the original plate; and   developing the exposed substrate.   
   
   
       14 . The driving apparatus of  claim 10 , wherein the mover includes at least one hydrostatic bearing, wherein the mover moves along the upper surface of the stator in a non-contact state therewith by ejecting a gas from the at least one hydrostatic bearing. 
   
   
       15 . An exposure apparatus for exposing a substrate to a pattern formed on an original plate, the exposure apparatus comprising the driving apparatus for driving an object of  claim 14 , wherein the object is one of the original plate and the substrate. 
   
   
       16 . A method for manufacturing a device comprising:
 using the exposure apparatus of  claim 15  to expose substrate to the pattern formed on the original plate; and   developing the exposed substrate.   
   
   
       17 . The driving apparatus of  claim 1 , wherein the stator includes a plurality of coils, the mover includes a plurality of magnets, and the mover is configured to move along the upper surface of the stator in a non-contact state therewith by applying an electric current to the plurality of coils.