Inventor · disambiguated record
Robert T. Hirahara
Also filed as: HIRAHARA ROBERT · HIRAHARA ROBERT T
13 granted patents·2 pending applications·56 citations·filing 2007–2019
89Inventor score
Top patents by PatentIndex Score
15 records- 0193US9349630B2Methods and apparatus for electrostatic chuck repair and refurbishmentAPPLIED MATERIALS INC·Filed 2014·Granted May 24, 2016·14 cites·5 claims
- 0289US11114326B2Substrate chucking and dechucking methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·6 cites·12 claims
- 0386US8320099B2Electrostatic chuck electrical balancing circuit repairHIRAHARA ROBERT T·Filed 2011·Granted Nov 27, 2012·8 cites·9 claims
- 0483US9613846B2Pad design for electrostatic chuck surfaceAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·5 cites·9 claims
- 0581US8464594B2Measuring flow properties of multiple gas nozzles of a gas distributorNARENDRNATH KADTHALA R·Filed 2011·Granted Jun 18, 2013·8 cites·43 claims
- 0677US9668373B2Substrate support chuck cooling for deposition chamberAPPLIED MATERIALS INC·Filed 2014·Granted May 30, 2017·4 cites·11 claims
- 0774US8064185B2Electrostatic chuck electrical balancing circuit repairHIRAHARA ROBERT T·Filed 2008·Granted Nov 22, 2011·4 cites·8 claims
- 0869US10049908B2Methods and apparatus for electrostatic chuck repair and refurbishmentAPPLIED MATERIALS INC·Filed 2016·Granted Aug 14, 2018·1 cites·20 claims
- 0968US10177014B2Thermal radiation barrier for substrate processing chamber componentsAPPLIED MATERIALS INC·Filed 2013·Granted Jan 8, 2019·2 cites·18 claims
- 1065US9917001B2High temperature fine grain aluminum heaterDESAI ABHI·Filed 2008·Granted Mar 13, 2018·4 cites·18 claims
- 1150US11054317B2Method and apparatus for direct measurement of chucking force on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·0 cites·17 claims
- 1250US9865489B2Substrate support chuck cooling for deposition chamberAPPLIED MATERIALS INC·Filed 2017·Granted Jan 9, 2018·0 cites·18 claims
- 1344US10347522B2Method to remove residual charge on a electrostatic chuck during the de-chucking stepAPPLIED MATERIALS INC·Filed 2017·Granted Jul 9, 2019·0 cites·19 claims
- 1441US2008190364A1Substrate support assemblyAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1533US2016230269A1Radially outward pad design for electrostatic chuck surfaceAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →