Inventor · disambiguated record
Songping Gao
Also filed as: GAO SONGPING
10 granted patents·2 pending applications·66 citations·filing 1999–2015
88Inventor score
Top patents by PatentIndex Score
12 records- 0191US7623227B2System and method for inspecting a workpiece surface using polarization of scattered lightKLA TENCOR CORP·Filed 2005·Granted Nov 24, 2009·11 cites·20 claims
- 0286US7557910B2System and method for controlling a beam source in a workpiece surface inspection systemKLA TENCOR CORP·Filed 2005·Granted Jul 7, 2009·6 cites·12 claims
- 0383US8427637B2Optical detection systemGAO SONGPING·Filed 2011·Granted Apr 23, 2013·5 cites·24 claims
- 0482US7839495B2System and method for controlling a beam source in a workpiece surface inspection systemKLA TENCOR CORP·Filed 2009·Granted Nov 23, 2010·3 cites·15 claims
- 0581US8059268B2Inspecting a workpiece using polarization of scattered lightJUDELL NEIL·Filed 2009·Granted Nov 15, 2011·3 cites·2 claims
- 0678US8537350B2Inspecting a workpiece using scattered lightJUDELL NEIL·Filed 2011·Granted Sep 17, 2013·1 cites·3 claims
- 0771US6122047AMethods and apparatus for identifying the material of a particle occurring on the surface of a substrateADE OPTICAL SYST CORP·Filed 1999·Granted Sep 19, 2000·37 cites·32 claims
- 0869US9518930B2Scattered light measurement systemKLA TENCOR CORP·Filed 2013·Granted Dec 13, 2016·0 cites·3 claims
- 0951US9110023B2Optical systemGAO SONGPING·Filed 2011·Granted Aug 18, 2015·0 cites·10 claims
- 1050US2015355051A1Optical systemGAO SONGPING·Filed 2015·Application pending·0 cites
- 1144US8624200B2Optical detection systemGAO SONGPING·Filed 2011·Granted Jan 7, 2014·0 cites·20 claims
- 1241US2013011928A1Optical detection system and/or methodANALOGIC CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →