Inventor · disambiguated record
Hirofumi Ichihara
Also filed as: ICHIHARA HIROFUMI
1 granted patent·1 pending application·2 citations·filing 2005–2014
20Inventor score
Technology areasH10P
Files withEBARA CORP2
Top patents by PatentIndex Score
2 records- 0170US10134614B2Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatusEBARA CORP·Filed 2014·Granted Nov 20, 2018·2 cites·19 claims
- 0244US2008274670A1Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing ApparatusEBARA CORP·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →