Inventor · disambiguated record
Shotaro Okabe
Also filed as: OKABE SHOTARO
31 granted patents·12 pending applications·946 citations·filing 1984–2008
98Inventor score
Files withCANON KK38
Top patents by PatentIndex Score
43 records- 0193US5720826APhotovoltaic element and fabrication process thereofCANON KK·Filed 1996·Granted Feb 24, 1998·132 cites·42 claims
- 0292US7501305B2Method for forming deposited film and photovoltaic elementCANON KK·Filed 2007·Granted Mar 10, 2009·21 cites·4 claims
- 0391US5589007APhotovoltaic elements and process and apparatus for their formationCANON KK·Filed 1995·Granted Dec 31, 1996·112 cites·21 claims
- 0490US6858308B2Semiconductor element, and method of forming silicon-based filmCANON KK·Filed 2002·Granted Feb 22, 2005·54 cites·85 claims
- 0589US7074641B2Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic elementCANON KK·Filed 2002·Granted Jul 11, 2006·47 cites·12 claims
- 0689US6794275B2Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axisCANON KK·Filed 2002·Granted Sep 21, 2004·48 cites·37 claims
- 0787US6399411B1Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic deviceCANON KK·Filed 2000·Granted Jun 4, 2002·35 cites·6 claims
- 0878US5968274AContinuous forming method for functional deposited films and deposition apparatusCANON KK·Filed 1996·Granted Oct 19, 1999·46 cites·15 claims
- 0976US6153013ADeposited-film-forming apparatusCANON KK·Filed 1997·Granted Nov 28, 2000·47 cites·10 claims
- 1075US5927994AMethod for manufacturing thin filmCANON KK·Filed 1997·Granted Jul 27, 1999·38 cites·11 claims
- 1173US6495392B2Process for producing a semiconductor deviceCANON KK·Filed 2001·Granted Dec 17, 2002·17 cites·11 claims
- 1273US5919310AContinuously film-forming apparatus provided with improved gas gate meansCANON KK·Filed 1996·Granted Jul 6, 1999·37 cites·11 claims
- 1372US5769963APhotovoltaic deviceCANON KK·Filed 1996·Granted Jun 23, 1998·39 cites·38 claims
- 1472US4545328APlasma vapor deposition film forming apparatusCANON KK·Filed 1984·Granted Oct 8, 1985·23 cites·2 claims
- 1571US6159763AMethod and device for forming semiconductor thin film, and method and device for forming photovoltaic elementCANON KK·Filed 1997·Granted Dec 12, 2000·39 cites·4 claims
- 1670US6287943B1Deposition of semiconductor layer by plasma processCANON KK·Filed 1999·Granted Sep 11, 2001·28 cites·24 claims
- 1769US6313430B1Plasma processing apparatus and plasma processing methodCANON KK·Filed 1999·Granted Nov 6, 2001·26 cites·27 claims
- 1868US6368944B1Method of manufacturing photovoltaic element and apparatus thereforCANON KK·Filed 2000·Granted Apr 9, 2002·6 cites·6 claims
- 1967US6271055B1Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layersCANON KK·Filed 1998·Granted Aug 7, 2001·28 cites·38 claims
- 2066US4913928AMicrowave plasma chemical vapor deposition apparatus with magnet on waveguideCANON KK·Filed 1988·Granted Apr 3, 1990·14 cites·3 claims
- 2165US6472296B2Fabrication of photovoltaic cell by plasma processCANON KK·Filed 2001·Granted Oct 29, 2002·7 cites·26 claims
- 2264US6436797B1Apparatus and method for forming a deposited film on a substrateCANON KK·Filed 2000·Granted Aug 20, 2002·7 cites·12 claims
- 2363US6159300AApparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic deviceCANON KK·Filed 1997·Granted Dec 12, 2000·23 cites·4 claims
- 2461US6162988APhotovoltaic elementCANON KK·Filed 1997·Granted Dec 19, 2000·18 cites·7 claims
- 2561US2007169890A1Exhaust processing method, plasma processing method and plasma processing apparatusCANON KK·Filed 2007·Application pending·0 cites
- 2659US2009084500A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2759US2009114155A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2859US2009095420A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2959US2009145555A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 3057US7211708B2Exhaust processing method, plasma processing method and plasma processing apparatusCANON KK·Filed 2001·Granted May 1, 2007·2 cites·6 claims
- 3156US6877458B2Apparatus for forming deposited filmCANON KK·Filed 2001·Granted Apr 12, 2005·2 cites·7 claims
- 3256US5897332AMethod for manufacturing photoelectric conversion elementCANON KK·Filed 1996·Granted Apr 27, 1999·20 cites·60 claims
- 3356US2008014345A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2007·Application pending·0 cites
- 3455US4539934APlasma vapor deposition film forming apparatusCANON KK·Filed 1984·Granted Sep 10, 1985·12 cites·1 claims
- 3549US2005161077A1Apparatus for manufacturing photovoltaic elementsCANON KK·Filed 2003·Application pending·0 cites
- 3648US5946587AContinuous forming method for functional deposited filmsCANON KK·Filed 1996·Granted Aug 31, 1999·12 cites·24 claims
- 3746US2003124819A1Method of manufacturing photovoltaic element and apparatus thereforFiled 2002·Application pending·0 cites
- 3844US2004161533A1Processing apparatus, exhaust processing process and plasma processing processFiled 2004·Application pending·0 cites
- 3942US2003022519A1Production apparatus of semiconductor layer employing DC bias and VHF powerFiled 2002·Application pending·0 cites
- 4039US4599971AVapor deposition film forming apparatusCANON KK·Filed 1985·Granted Jul 15, 1986·3 cites·1 claims
- 4138US2004011290A1Apparatus and process for forming deposited filmFiled 2003·Application pending·0 cites
- 4235US6530341B1Deposition apparatus for manufacturing thin filmCANON KK·Filed 1999·Granted Mar 11, 2003·3 cites·12 claims
- 4330US2003164225A1Processing apparatus, exhaust processing process and plasma processingFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →