Inventor · disambiguated record
C. Neil Berglund
Also filed as: BERGLUND C NEIL
8 granted patents·601 citations·filing 1982–2003
90Inventor score
Files withETEC SYSTEMS INC3APPLIED MATERIALS INC1INTEL CORP1NORTHWEST TECHNOLOGY CORP1UNIV OREGON HEALTH & SCIENCE1
Top patents by PatentIndex Score
8 records- 0195US5103101AMultiphase printing for E-beam lithographyETEC SYSTEMS INC·Filed 1991·Granted Apr 7, 1992·154 cites·17 claims
- 0294US5086477AAutomated system for extracting design and layout information from an integrated circuitNORTHWEST TECHNOLOGY CORP·Filed 1990·Granted Feb 4, 1992·222 cites·35 claims
- 0391US5393987ADose modulation and pixel deflection for raster scan lithographyETEC SYSTEMS INC·Filed 1993·Granted Feb 28, 1995·96 cites·33 claims
- 0486US6220914B1Method of forming gated photocathode for controlled single and multiple electron beam emissionETEC SYSTEMS INC·Filed 1999·Granted Apr 24, 2001·42 cites·18 claims
- 0586US6145438AMethod and apparatus for direct writing of semiconductor die using microcolumn arrayFiled 1998·Granted Nov 14, 2000·50 cites·24 claims
- 0677US6376985B2Gated photocathode for controlled single and multiple electron beam emissionAPPLIED MATERIALS INC·Filed 1998·Granted Apr 23, 2002·25 cites·35 claims
- 0771US6803582B2One dimensional beam blanker arrayUNIV OREGON HEALTH & SCIENCE·Filed 2003·Granted Oct 12, 2004·9 cites·98 claims
- 0831US4409259AMOS Dynamic RAM cell and method of fabricationINTEL CORP·Filed 1982·Granted Oct 11, 1983·3 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →