Inventor · disambiguated record
Steven Marcus
Also filed as: MARCUS STEVEN · MARCUS STEVEN D · MARCUS STEVEN DARRELL
31 granted patents·13 pending applications·300 citations·filing 1998–2024
96Inventor score
Files withAPPLIED MATERIALS INC16ASM INC7TTI MACAO COMMERCIAL OFFSHORE LTD6TECHTRONIC FLOOR CARE TECH LTD3MILLIGAN ROBERT B2
Top patents by PatentIndex Score
44 records- 0196US8383525B2Plasma-enhanced deposition process for forming a metal oxide thin film and related structuresASM INC·Filed 2008·Granted Feb 26, 2013·84 cites·26 claims
- 0295US7608549B2Method of forming non-conformal layersASM INC·Filed 2006·Granted Oct 27, 2009·40 cites·26 claims
- 0393US8334218B2Method of forming non-conformal layersVAN NOOTEN SEBASTIAN E·Filed 2009·Granted Dec 18, 2012·58 cites·15 claims
- 0492US10531772B2Handheld vacuum cleanerTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2017·Granted Jan 14, 2020·5 cites·25 claims
- 0592US10470625B2Vacuum cleaner and filter for a vacuum cleanerTTI MACAO COMMERICAL OFFSHORE LTD·Filed 2017·Granted Nov 12, 2019·6 cites·20 claims
- 0692US7595270B2Passivated stoichiometric metal nitride filmsASM INC·Filed 2007·Granted Sep 29, 2009·17 cites·45 claims
- 0791US11230763B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·2 cites·14 claims
- 0889US8268409B2Plasma-enhanced deposition of metal carbide filmsELERS KAI-ERIK·Filed 2007·Granted Sep 18, 2012·14 cites·40 claims
- 0989US7666474B2Plasma-enhanced pulsed deposition of metal carbide filmsASM INC·Filed 2008·Granted Feb 23, 2010·17 cites·31 claims
- 1088US10570511B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2015·Granted Feb 25, 2020·2 cites·13 claims
- 1187US11607637B2Power tool including an air filter and debris collectorMILWAUKEE ELECTRIC TOOL CORP·Filed 2019·Granted Mar 21, 2023·3 cites·13 claims
- 1286US12305275B2Corrosion resistant film on a chamber component and methods of depositing thereofAPPLIED MATERIALS INC·Filed 2023·Granted May 20, 2025·0 cites·20 claims
- 1382US10743731B2Vacuum filterTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2017·Granted Aug 18, 2020·3 cites·39 claims
- 1482US9631272B2Atomic layer deposition of metal carbide films using aluminum hydrocarbon compoundsASM INC·Filed 2013·Granted Apr 25, 2017·4 cites·13 claims
- 1580US11821083B2Gas separation control in spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·0 cites·19 claims
- 1677US12074010B2Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2021·Granted Aug 27, 2024·1 cites·67 claims
- 1775US2021361135A1Dirt collector for a vacuum cleanerTECHTRONIC FLOOR CARE TECH LTD·Filed 2021·Application pending·0 cites
- 1874US11058273B2Vacuum cleanerTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2018·Granted Jul 13, 2021·1 cites·20 claims
- 1973US11932938B2Corrosion resistant film on a chamber component and methods of depositing thereofAPPLIED MATERIALS INC·Filed 2020·Granted Mar 19, 2024·0 cites·12 claims
- 2072US11612291B2Vacuum cleanerTECHTRONIC FLOOR CARE TECH LTD·Filed 2021·Granted Mar 28, 2023·0 cites·20 claims
- 2172US11612292B2Vacuum cleanerTECHTRONIC FLOOR CARE TECH LTD·Filed 2021·Granted Mar 28, 2023·0 cites·20 claims
- 2271US11363922B2Vacuum cleaner and filter for a vacuum cleanerTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2019·Granted Jun 21, 2022·0 cites·24 claims
- 2370US2024420926A1Atomic layer deposition part coating chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2467US11164753B2Self-aligned double patterning with spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2015·Granted Nov 2, 2021·1 cites·15 claims
- 2565US12431361B2Self-aligned double patterning with spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2021·Granted Sep 30, 2025·0 cites·16 claims
- 2662US2020121142A1Handheld vacuum cleanerTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2019·Application pending·0 cites
- 2761US12486571B2Atomic layer deposition coating system for inner walls of gas linesAPPLIED MATERIALS INC·Filed 2022·Granted Dec 2, 2025·0 cites·20 claims
- 2861US6303520B1Silicon oxynitride filmMATTSON TECH INC·Filed 1998·Granted Oct 16, 2001·28 cites·10 claims
- 2961US2023323531A1Coating interior surfaces of complex bodies by atomic layer depositionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3060US11083354B2Dirt collector for a vacuum cleanerTTI MACAO COMMERCIAL OFFSHORE LTD·Filed 2018·Granted Aug 10, 2021·0 cites·19 claims
- 3155US8557702B2Plasma-enhanced atomic layers deposition of conductive material over dielectric layersMILLIGAN ROBERT B·Filed 2010·Granted Oct 15, 2013·2 cites·28 claims
- 3255US2014023794A1Method And Apparatus For Low Temperature ALD DepositionMAHAJANI MAITREYEE·Filed 2013·Application pending·0 cites
- 3355US2009315093A1Atomic layer deposition of metal carbide films using aluminum hydrocarbon compoundsASM INC·Filed 2009·Application pending·0 cites
- 3453US11658014B2Apparatuses and methods of protecting nickel and nickel containing components with thin filmsAPPLIED MATERIALS INC·Filed 2020·Granted May 23, 2023·0 cites·17 claims
- 3552US2013164445A1Self-Contained Heating ElementKWONG GARRY K·Filed 2012·Application pending·0 cites
- 3651US11946140B2Hot showerheadAPPLIED MATERIALS INC·Filed 2021·Granted Apr 2, 2024·0 cites·18 claims
- 3751US9466574B2Plasma-enhanced atomic layer deposition of conductive material over dielectric layersASM INC·Filed 2013·Granted Oct 11, 2016·0 cites·12 claims
- 3851US2012269967A1Hot Wire Atomic Layer Deposition Apparatus And Methods Of UseYUDOVSKY JOSEPH·Filed 2012·Application pending·0 cites
- 3950US2013019960A1Reactant Delivery System For ALD/CVD ProcessesAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 4049US2013143415A1Multi-Component Film DepositionYUDOVSKY JOSEPH·Filed 2011·Application pending·0 cites
- 4142US2015252477A1In-situ carbon and oxide doping of atomic layer deposition silicon nitride filmsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4241US2012100308A1Ternary metal alloys with tunable stoichiometriesMILLIGAN ROBERT B·Filed 2010·Application pending·0 cites
- 4337US6077751AMethod of rapid thermal processing (RTP) of ion implanted siliconSTEAG RTP SYSTEMS GMBH·Filed 1998·Granted Jun 20, 2000·12 cites·14 claims
- 4434US2015255324A1Seamless gap-fill with spatial atomic layer depositionAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →