Inventor · disambiguated record
Serkan Kincal
Also filed as: KINCAL SERKAN
3 granted patents·1 pending application·18 citations·filing 2008–2021
58Inventor score
Top patents by PatentIndex Score
4 records- 0185US7899571B2Predictive method to improve within wafer CMP uniformity through optimized pad conditioningTEXAS INSTRUMENTS INC·Filed 2008·Granted Mar 1, 2011·18 cites·18 claims
- 0253US12222050B2Robust fluid coupling apparatusASML NETHERLANDS BV·Filed 2021·Granted Feb 11, 2025·0 cites·25 claims
- 0335US11963285B2Target material control in an EUV light sourceASML NETHERLANDS BV·Filed 2020·Granted Apr 16, 2024·0 cites·40 claims
- 0433US2011117680A1Inline detection of substrate positioning during processingAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →