Inventor · disambiguated record
Lena Nicolaides
Also filed as: NICOLAIDES LENA
39 granted patents·3 pending applications·352 citations·filing 2000–2021
98Inventor score
Top patents by PatentIndex Score
42 records- 0196US9772297B2Apparatus and methods for combined brightfield, darkfield, and photothermal inspectionKLA TENCOR CORP·Filed 2015·Granted Sep 26, 2017·12 cites·13 claims
- 0291US9709386B1Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometryKLA TENCOR CORP·Filed 2016·Granted Jul 18, 2017·10 cites·17 claims
- 0391US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 0490US10599951B2Training a neural network for defect detection in low resolution imagesKLA TENCOR CORP·Filed 2019·Granted Mar 24, 2020·19 cites·31 claims
- 0590US10563973B2All surface film metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 18, 2020·11 cites·16 claims
- 0690US7502104B2Probe beam profile modulated optical reflectance system and methodsKLA TENCOR CORP·Filed 2007·Granted Mar 10, 2009·15 cites·24 claims
- 0789US8415961B1Measuring sheet resistance and other properties of a semiconductorZHAO GUOHENG·Filed 2010·Granted Apr 9, 2013·8 cites·24 claims
- 0888US7116424B2Modulated reflectance measurement system with multiple wavelengthsTHERMA WAVE INC·Filed 2005·Granted Oct 3, 2006·9 cites·7 claims
- 0987US7755752B1Combined modulated optical reflectance and photoreflectance systemKLA TENCOR CORP·Filed 2008·Granted Jul 13, 2010·19 cites·30 claims
- 1086US10533954B2Apparatus and methods for combined brightfield, darkfield, and photothermal inspectionKLA TENCOR CORP·Filed 2017·Granted Jan 14, 2020·2 cites·9 claims
- 1186US8436554B2LED solar illuminatorZHAO GUOHENG·Filed 2011·Granted May 7, 2013·9 cites·20 claims
- 1285US9640449B2Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopyKLA TENCOR CORP·Filed 2015·Granted May 2, 2017·5 cites·21 claims
- 1385US7106446B2Modulated reflectance measurement system with multiple wavelengthsTHERMA WAVE INC·Filed 2003·Granted Sep 12, 2006·18 cites·18 claims
- 1485US6917039B2Method and system for combined photothermal modulated reflectance and photothermal IR radiometric systemTHERMA WAVE INC·Filed 2002·Granted Jul 12, 2005·21 cites·14 claims
- 1584US7362441B2Modulated reflectance measurement system using UV probeKLA TENCOR CORP·Filed 2006·Granted Apr 22, 2008·6 cites·12 claims
- 1683US9747520B2Systems and methods for enhancing inspection sensitivity of an inspection toolKLA TENCOR CORP·Filed 2016·Granted Aug 29, 2017·5 cites·17 claims
- 1782US7705977B2Methods for depth profiling in semiconductors using modulated optical reflectance technologyKLA TENCOR CORP·Filed 2007·Granted Apr 27, 2010·6 cites·24 claims
- 1882US7660686B1Ion implant metrology system with fault detection and identificationKLA TENCOR CORP·Filed 2008·Granted Feb 9, 2010·9 cites·21 claims
- 1981US7280215B2Photothermal system with spectroscopic pump and probeTHERMA WAVE INC·Filed 2004·Granted Oct 9, 2007·18 cites·60 claims
- 2081US6989899B2Ion implant monitoring through measurement of modulated optical responseTHERMA WAVE INC·Filed 2003·Granted Jan 24, 2006·15 cites·14 claims
- 2178US7499168B2Combined modulated optical reflectance and electrical system for ultra-shallow junctions applicationsKLA TENCOR CORP·Filed 2007·Granted Mar 3, 2009·5 cites·10 claims
- 2277US7646486B2Modulated reflectance measurement system using UV probeKLA TENCOR CORP·Filed 2008·Granted Jan 12, 2010·3 cites·33 claims
- 2377US7619741B2Modulated reflectance measurement system with multiple wavelengthsKLA TENCOR CORP·Filed 2008·Granted Nov 17, 2009·3 cites·16 claims
- 2477US7423757B2Modulated reflectance measurement system with multiple wavelengthsKLA TENCOR CORP·Filed 2006·Granted Sep 9, 2008·3 cites·18 claims
- 2576US8817260B2Modulated reflectance measurement system using UV probeOPSAL JON·Filed 2009·Granted Aug 26, 2014·4 cites·7 claims
- 2676US7982867B2Methods for depth profiling in semiconductors using modulated optical reflectance technologyKLA TENCOR CORP·Filed 2010·Granted Jul 19, 2011·2 cites·16 claims
- 2776US7212288B2Position modulated optical reflectance measurement system for semiconductor metrologyTHERMA WAVE INC·Filed 2004·Granted May 1, 2007·12 cites·21 claims
- 2875US7002690B2Ion implant monitoring through measurement of modulated optical responseTHERMA WAVE INC·Filed 2005·Granted Feb 21, 2006·3 cites·16 claims
- 2974US7060980B2Method and system for combined photothermal modulated reflectance and photothermal IR radiometric systemTHERMA WAVE INC·Filed 2005·Granted Jun 13, 2006·3 cites·18 claims
- 3071US7079249B2Modulated reflectance measurement system with fiber laser technologyTHERMA WAVE INC·Filed 2003·Granted Jul 18, 2006·9 cites·3 claims
- 3170US7403022B2Method for measuring peak carrier concentration in ultra-shallow junctionsKLA TENCOR INC·Filed 2006·Granted Jul 22, 2008·3 cites·9 claims
- 3269US7248367B2Characterization of ultra shallow junctions in semiconductor wafersTHERMA WAVE INC·Filed 2004·Granted Jul 24, 2007·7 cites·16 claims
- 3369US6584341B1Method and apparatus for detection of defects in teethFiled 2000·Granted Jun 24, 2003·64 cites·17 claims
- 3463US8120776B1Measuring characteristics of ultra-shallow junctionsSALNIK ALEX·Filed 2009·Granted Feb 21, 2012·1 cites·14 claims
- 3561US11644756B23D structure inspection or metrology using deep learningKLA CORP·Filed 2021·Granted May 9, 2023·0 cites·26 claims
- 3661US8535957B1Dopant metrology with information feedforward and feedbackSALNIK ALEX·Filed 2011·Granted Sep 17, 2013·1 cites·24 claims
- 3759US7330260B2Method for measuring ion-implanted semiconductors with improved repeatabilityKLA TENCOR CORP·Filed 2005·Granted Feb 12, 2008·1 cites·38 claims
- 3859US7126690B2Modulated reflectance measurement system using UV probeTHERMA WAVE INC·Filed 2003·Granted Oct 24, 2006·1 cites·11 claims
- 3953US8962351B1Dopant metrology with information feedforward and feedbackKLA TENCOR CORP·Filed 2013·Granted Feb 24, 2015·0 cites·26 claims
- 4048US2004253751A1Photothermal ultra-shallow junction monitoring system with UV pumpFiled 2004·Application pending·0 cites
- 4145US2008074668A1Modulated optical reflectance measurement system with enhanced sensitivitySALNIK ALEX·Filed 2007·Application pending·0 cites
- 4234US2002011852A1Non-contact photothermal radiometric metrologies and instrumentation for characterization of semiconductor wafers, devices and non electronic materialsFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →