Inventor · disambiguated record

Tristan Y. Ma

Also filed as: MA TRISTAN · MA TRISTAN Y · MA TRISTAN YONGHUI

28 granted patents·2 pending applications·59 citations·filing 2012–2022

94Inventor score

Technology areasH10P G03F H10W C23C H01J

Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC18 APPLIED MATERIALS INC7 VARIAN SEMICONDUCTOR EQUIPMENT3 DARBY BLAKE L1 MA TRISTAN1

Top patents by PatentIndex Score

30 records

0197US9377692B2Electric/magnetic field guided acid diffusionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·18 cites·12 claims
0293US11942361B2Semiconductor device cavity formation using directional depositionAPPLIED MATERIALS INC·Filed 2021·Granted Mar 26, 2024·2 cites·15 claims
0393US9385219B2Method and apparatus for selective depositionAPPLIED MATERIALS INC·Filed 2015·Granted Jul 5, 2016·11 cites·20 claims
0489US11459652B2Techniques and device structures based upon directional dielectric deposition and bottom-up fillAPPLIED MATERIALS INC·Filed 2020·Granted Oct 4, 2022·2 cites·20 claims
0588US10310379B2Multiple patterning approach using ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 4, 2019·5 cites·18 claims
0688US9659784B1Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 23, 2017·5 cites·16 claims
0781US10222202B2Three dimensional structure fabrication control using novel processing systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Mar 5, 2019·2 cites·16 claims
0876US9520290B1Ion implantation for improved etch performanceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 13, 2016·2 cites·19 claims
0975US10553448B2Techniques for processing a polycrystalline layer using an angled ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Feb 4, 2020·2 cites·18 claims
1075US9336998B2Apparatus and method for dynamic control of ion beam energy and angleVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted May 10, 2016·3 cites·18 claims
1173US12422210B2Techniques and device structures based upon directional dielectric deposition and bottom-up fillAPPLIED MATERIALS INC·Filed 2022·Granted Sep 23, 2025·0 cites·19 claims
1270US12191156B2Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 7, 2025·0 cites·17 claims
1368US10269663B2Critical dimensions variance compensationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 23, 2019·1 cites·9 claims
1468US10002764B1Sputter etch material selectivityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Jun 19, 2018·1 cites·19 claims
1567US10990014B2Performance improvement of EUV photoresist by ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Apr 27, 2021·0 cites·11 claims
1667US10204909B2Non-uniform gate oxide thickness for DRAM deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Feb 12, 2019·1 cites·14 claims
1767US9929015B2High efficiency apparatus and method for depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 27, 2018·1 cites·15 claims
1866US9268228B2Techniques for patterning a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Feb 23, 2016·1 cites·15 claims
1965US9460961B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 4, 2016·1 cites·12 claims
2065US8906576B2Material engineering for high performance Li-ion battery electrodesDARBY BLAKE L·Filed 2012·Granted Dec 9, 2014·1 cites·18 claims
2161US10545408B2Performance improvement of EUV photoresist by ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 28, 2020·0 cites·16 claims
2256US11778832B2Wordline contact formation in NAND devicesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
2355US9885957B2Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 6, 2018·0 cites·14 claims
2452US9435038B2Ion implant assisted metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 6, 2016·0 cites·17 claims
2552US2014037858A1Anisotropic surface energy modulation by ion implantationMA TRISTAN·Filed 2012·Application pending·0 cites
2650US9396965B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Jul 19, 2016·0 cites·13 claims
2747US2016379844A1Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Application pending·0 cites
2843US10937663B2Selective photoresist etching for bridge defect removalVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Mar 2, 2021·0 cites·20 claims
2942US9512517B2Multiple exposure treatment for processing a patterning featureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 6, 2016·0 cites·20 claims
3038US9735013B2Ion implantation for improved contact hole critical dimension uniformityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 15, 2017·0 cites·18 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →