Inventor · disambiguated record
Stefanie Harvey
Also filed as: HARVEY STEFANIE · HARVEY STEFANIE E · HARVEY STEFANIE EDITH
3 granted patents·2 pending applications·96 citations·filing 1996–2011
74Inventor score
Top patents by PatentIndex Score
5 records- 0189US6466895B1Defect reference system automatic pattern classificationAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·67 cites·24 claims
- 0263US5745332AMonopolar electrostatic chuck having an electrode in contact with a workpieceAPPLIED MATERIALS INC·Filed 1996·Granted Apr 28, 1998·26 cites·14 claims
- 0342US2013025907A1Carbon-based substrate conductorTYCO ELECTRONICS CORP·Filed 2011·Application pending·0 cites
- 0435US2002096195A1Method and apparatus for critical flow particle removalAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 0532US5982607AMonopolar electrostatic chuck having an electrode in contact with a workpieceAPPLIED MATERIALS INC·Filed 1998·Granted Nov 9, 1999·3 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →