Inventor · disambiguated record
Yen B. Ta
Also filed as: TA YEN B
4 granted patents·3 pending applications·11 citations·filing 2008–2012
67Inventor score
Top patents by PatentIndex Score
7 records- 0178US8802522B2Methods to adjust threshold voltage in semiconductor devicesWARD MICHAEL G·Filed 2011·Granted Aug 12, 2014·7 cites·20 claims
- 0275US7659184B2Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechuckingAPPLIED MATERIALS INC·Filed 2008·Granted Feb 9, 2010·3 cites·13 claims
- 0367US8003500B2Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechuckingAPPLIED MATERIALS INC·Filed 2009·Granted Aug 23, 2011·1 cites·7 claims
- 0450US7968401B2Reducing photoresist layer degradation in plasma immersion ion implantationAPPLIED MATERIALS INC·Filed 2009·Granted Jun 28, 2011·0 cites·20 claims
- 0535US2010297854A1High throughput selective oxidation of silicon and polysilicon using plasma at room temperatureAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 0632US2012302048A1Pre or post-implant plasma treatment for plasma immersed ion implantation processSANTHANAM KARTIK·Filed 2012·Application pending·0 cites
- 0731US2012289036A1Surface dose retention of dopants by pre-amorphization and post implant passivation treatmentsSANTHANAM KARTIK·Filed 2012·Application pending·0 cites
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