Assignee
SANTHANAM KARTIK
US·1 granted patent·4 pending applications·0 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0137US8501605B2Methods and apparatus for conformal dopingSANTHANAM KARTIK·Filed 2011·Granted Aug 6, 2013·0 cites·18 claims
- 0232US2012302048A1Pre or post-implant plasma treatment for plasma immersed ion implantation processSANTHANAM KARTIK·Filed 2012·Application pending·0 cites
- 0332US2012088356A1Integrated platform for in-situ doping and activation of substratesSANTHANAM KARTIK·Filed 2011·Application pending·0 cites
- 0431US2012289036A1Surface dose retention of dopants by pre-amorphization and post implant passivation treatmentsSANTHANAM KARTIK·Filed 2012·Application pending·0 cites
- 0531US2013095643A1Methods for implanting dopant species in a substrateSANTHANAM KARTIK·Filed 2011·Application pending·0 cites
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