Inventor · disambiguated record
Biraja P. Kanungo
Also filed as: KANUNGO BIRAJA · KANUNGO BIRAJA P · KANUNGO BIRAJA PRASAD
60 granted patents·15 pending applications·486 citations·filing 2012–2023
98Inventor score
Files withAPPLIED MATERIALS INC75
Top patents by PatentIndex Score
75 records- 0199US9617188B2Rare-earth oxide based coatingAPPLIED MATERIALS INC·Filed 2016·Granted Apr 11, 2017·40 cites·20 claims
- 0299US9212099B2Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramicsAPPLIED MATERIALS INC·Filed 2013·Granted Dec 15, 2015·56 cites·15 claims
- 0399US9090046B2Ceramic coated article and process for applying ceramic coatingAPPLIED MATERIALS INC·Filed 2013·Granted Jul 28, 2015·68 cites·12 claims
- 0498US9583369B2Ion assisted deposition for rare-earth oxide based coatings on lids and nozzlesAPPLIED MATERIALS INC·Filed 2013·Granted Feb 28, 2017·46 cites·11 claims
- 0598US9440886B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2014·Granted Sep 13, 2016·48 cites·18 claims
- 0697US12195839B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2023·Granted Jan 14, 2025·1 cites·20 claims
- 0797US10119188B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·8 cites·20 claims
- 0897US9976211B2Plasma erosion resistant thin film coating for high temperature applicationAPPLIED MATERIALS INC·Filed 2015·Granted May 22, 2018·10 cites·13 claims
- 0997US9884787B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2016·Granted Feb 6, 2018·12 cites·20 claims
- 1097US9725799B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 8, 2017·15 cites·15 claims
- 1197US9711334B2Ion assisted deposition for rare-earth oxide based thin film coatings on process ringsAPPLIED MATERIALS INC·Filed 2013·Granted Jul 18, 2017·16 cites·13 claims
- 1297US9343289B2Chemistry compatible coating material for advanced device on-wafer particle performanceAPPLIED MATERIALS INC·Filed 2013·Granted May 17, 2016·26 cites·15 claims
- 1396US9869012B2Ion assisted deposition for rare-earth oxide based coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 16, 2018·9 cites·20 claims
- 1496US9394615B2Plasma resistant ceramic coated conductive articleAPPLIED MATERIALS INC·Filed 2012·Granted Jul 19, 2016·43 cites·20 claims
- 1595US9890086B2Rare-earth oxide based monolithic chamber materialAPPLIED MATERIALS INC·Filed 2016·Granted Feb 13, 2018·7 cites·14 claims
- 1694US10501843B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 10, 2019·3 cites·20 claims
- 1793US11053581B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·2 cites·20 claims
- 1893US9865434B2Rare-earth oxide based erosion resistant coatings for semiconductor applicationAPPLIED MATERIALS INC·Filed 2013·Granted Jan 9, 2018·5 cites·18 claims
- 1993US9850568B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 26, 2017·11 cites·20 claims
- 2093US9708713B2Aerosol deposition coating for semiconductor chamber componentsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 18, 2017·5 cites·16 claims
- 2192US10418229B2Aerosol deposition coating for semiconductor chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Sep 17, 2019·3 cites·20 claims
- 2292US9797037B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2016·Granted Oct 24, 2017·2 cites·9 claims
- 2391US10815562B2Plasma erosion resistant thin film coating for high temperature applicationAPPLIED MATERIALS INC·Filed 2018·Granted Oct 27, 2020·4 cites·20 claims
- 2489US12162115B2Chamber components with polished internal aperturesAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 2588US9970095B2Ion assisted deposition top coat of rare-earth oxideAPPLIED MATERIALS INC·Filed 2016·Granted May 15, 2018·5 cites·18 claims
- 2688US9812341B2Rare-earth oxide based coatings based on ion assisted depositionAPPLIED MATERIALS INC·Filed 2017·Granted Nov 7, 2017·3 cites·20 claims
- 2787US10584068B2Rare-earth oxide based chamber materialAPPLIED MATERIALS INC·Filed 2017·Granted Mar 10, 2020·2 cites·17 claims
- 2887US10577286B2Rare-earth oxide based chamber materialAPPLIED MATERIALS INC·Filed 2017·Granted Mar 3, 2020·2 cites·17 claims
- 2987US10563297B2Ion assisted deposition top coat of rare-earth oxideAPPLIED MATERIALS INC·Filed 2017·Granted Feb 18, 2020·1 cites·9 claims
- 3087US10385459B2Advanced layered bulk ceramics via field assisted sintering technologyAPPLIED MATERIALS INC·Filed 2015·Granted Aug 20, 2019·3 cites·20 claims
- 3187US9687953B2Chamber components with polished internal aperturesAPPLIED MATERIALS INC·Filed 2014·Granted Jun 27, 2017·4 cites·9 claims
- 3285US11279661B2Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·1 cites·15 claims
- 3385US10930526B2Rare-earth oxide based coatings based on ion assisted depositionAPPLIED MATERIALS INC·Filed 2017·Granted Feb 23, 2021·2 cites·20 claims
- 3485US10020170B2Chemistry compatible coating material for advanced device on-wafer particle performanceAPPLIED MATERIALS INC·Filed 2016·Granted Jul 10, 2018·3 cites·18 claims
- 3584US11724353B2Chamber components with polished internal aperturesAPPLIED MATERIALS INC·Filed 2022·Granted Aug 15, 2023·0 cites·11 claims
- 3684US10544500B2Ion assisted deposition top coat of rare-earth oxideAPPLIED MATERIALS INC·Filed 2017·Granted Jan 28, 2020·3 cites·20 claims
- 3783US10364197B2Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2015·Granted Jul 30, 2019·1 cites·12 claims
- 3881US11680308B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2021·Granted Jun 20, 2023·0 cites·20 claims
- 3979US10818481B2Smart device fabrication via precision patterningAPPLIED MATERIALS INC·Filed 2016·Granted Oct 27, 2020·2 cites·12 claims
- 4079US10196728B2Plasma spray coating design using phase and stress controlAPPLIED MATERIALS INC·Filed 2015·Granted Feb 5, 2019·3 cites·12 claims
- 4178US10468235B2Plasma spray coating enhancement using plasma flame heat treatmentAPPLIED MATERIALS INC·Filed 2014·Granted Nov 5, 2019·2 cites·20 claims
- 4278US9869013B2Ion assisted deposition top coat of rare-earth oxideAPPLIED MATERIALS INC·Filed 2014·Granted Jan 16, 2018·3 cites·5 claims
- 4378US2021317049A1Heat treated ceramic substrate having ceramic coatingAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4477US11773479B2Plasma erosion resistant thin film coating for high temperature applicationAPPLIED MATERIALS INC·Filed 2020·Granted Oct 3, 2023·0 cites·15 claims
- 4576US11424136B2Rare-earth oxide based coatings based on ion assisted depositionAPPLIED MATERIALS INC·Filed 2020·Granted Aug 23, 2022·0 cites·20 claims
- 4676US10604831B2Plasma spray coating design using phase and stress controlAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·0 cites·19 claims
- 4776US2018366302A1Coating architecture for plasma sprayed chamber componentsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4874US11566318B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 31, 2023·0 cites·14 claims
- 4974US9916998B2Substrate support assembly having a plasma resistant protective layerAPPLIED MATERIALS INC·Filed 2013·Granted Mar 13, 2018·2 cites·11 claims
- 5073US11578398B2Plasma spray coating design using phase and stress controlAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·0 cites·18 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
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