Coating architecture for plasma sprayed chamber components

Abstract

A method of plasma spraying an article comprises providing an article, feeding a liquid precursor solution into a plasma spray deposition system, and generating, with the plasma spray deposition system, a stream directed toward the article. The stream forms a ceramic coating on the article upon contact therewith. The ceramic coating comprises Y 2 O 3 and one or more of ZrO 2 , Al 2 O 3 , Er 2 O 3 , Gd 2 O 3 , SiO 2 , or YF 3 .

What is claimed is: 
     
         1 . A method comprising:
 providing an article;   feeding a liquid precursor solution into a plasma spray deposition system; and   generating, with the plasma spray deposition system, a stream directed toward the article, wherein the stream forms a ceramic coating on the article upon contact therewith, and wherein the ceramic coating comprises Y 2 O 3  and one or more of ZrO 2 , Al 2 O 3 , Er 2 O 3 , Gd 2 O 3 , SiO 2 , or YF 3 .   
     
     
         2 . The method of  claim 1 , wherein a composition of the ceramic coating is selected from:
 50-75 mol % of Y 2 O 3 , 10-30 mol % of ZrO 2 , and 10-30 mol % of Al 2 O 3 ;   40-100 mol % of Y 2 O 3 , 0-60 mol % of ZrO 2 , and 0-10 mol % of Al 2 O 3 ;   40-60 mol % of Y 2 O 3 , 30-50 mol % of ZrO 2 , and 10-20 mol % of Al 2 O 3 ;   40-50 mol % of Y 2 O 3 , 20-40 mol % of ZrO 2 , and 20-40 mol % of Al 2 O 3 ;   70-90 mol % of Y 2 O 3 , 0-20 mol % of ZrO 2 , and 10-20 mol % of Al 2 O 3 ;   60-80 mol % of Y 2 O 3 , 0-10 mol % of ZrO 2 , and 20-40 mol % of Al 2 O 3 ; or   40-60 mol % of Y 2 O 3 , 0-20 mol % of ZrO 2 , and 30-40 mol % of Al 2 O 3 .   
     
     
         3 . The method of  claim 1 , wherein the ceramic coating comprises ZrO 2 , Er 2 O 3 , Gd 2 O 3 , and SiO 2 . 
     
     
         4 . The method of  claim 1 , wherein the ceramic coating comprises 40-45 mol % of Y 2 O 3 , 0-10 mol % of ZrO 2 , 35-40 mol % of Er 2 O 3 , 5-10 mol % of Gd 2 O 3 , and 5-15 mole % of SiO 2 . 
     
     
         5 . The method of  claim 1 , wherein the ceramic coating comprises YF 3 . 
     
     
         6 . The method of  claim 1 , wherein a thickness of the ceramic coating is from about 20 micrometers to about 500 micrometers. 
     
     
         7 . The method of  claim 1 , wherein a surface roughness of the ceramic coating is from about 100 micro-inches to about 300 micro-inches. 
     
     
         8 . The method of  claim 1 , wherein a porosity of the ceramic coating is less than about 1%. 
     
     
         9 . The method of  claim 1 , wherein the article is a chamber component selected from a group consisting of a substrate support assembly, an electrostatic chuck, a ring, a chamber wall, a base, a gas distribution plate, a showerhead, a liner, a liner kit, a shield, a plasma screen, a flow equalizer, a cooling base, a chamber viewport, a chamber lid, a nozzle, or a process kit ring. 
     
     
         10 . A method comprising:
 providing an article;   feeding a liquid precursor solution into a plasma spray deposition system; and   generating, with the plasma spray deposition system, a stream directed toward the article, wherein the stream forms a ceramic coating on the article upon contact therewith, and wherein the ceramic coating comprises one or more of Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 , Nd 2 O 3 , or a ceramic compound comprising Y 4 Al 2 O 9  and a solid-solution of Y 2 O 3 —ZrO 2 .   
     
     
         11 . A method comprising:
 providing an article, the article comprising a ceramic coating disposed thereon;   feeding a liquid precursor solution into a plasma spray deposition system; and   generating, with the plasma spray deposition system, a stream directed toward the article, wherein the stream forms a second ceramic coating on the first ceramic coating upon contact therewith, and wherein at least one of the first or second ceramic coatings comprises Y 4 Al 2 O 9  and a solid-solution of Y 2 O 3 —ZrO 2 .   
     
     
         12 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings comprises a composition selected from:
 50-75 mol % of Y 2 O 3 , 10-30 mol % of ZrO 2 , and 10-30 mol % of Al 2 O 3 ;   40-100 mol % of Y 2 O 3 , 0-60 mol % of ZrO 2 , and 0-10 mol % of Al 2 O 3 ;   40-60 mol % of Y 2 O 3 , 30-50 mol % of ZrO 2 , and 10-20 mol % of Al 2 O 3 ;   40-50 mol % of Y 2 O 3 , 20-40 mol % of ZrO 2 , and 20-40 mol % of Al 2 O 3 ;   70-90 mol % of Y 2 O 3 , 0-20 mol % of ZrO 2 , and 10-20 mol % of Al 2 O 3 ;   60-80 mol % of Y 2 O 3 , 0-10 mol % of ZrO 2 , and 20-40 mol % of Al 2 O 3 ; or   40-60 mol % of Y 2 O 3 , 0-20 mol % of ZrO 2 , and 30-40 mol % of Al 2 O 3 .   
     
     
         13 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings comprises Y 2 O 3  and one or more of ZrO 2 , Er 2 O 3 , Gd 2 O 3 , or SiO 2 . 
     
     
         14 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings comprises 40-45 mol % of Y 2 O 3 , 0-10 mol % of ZrO 2 , 35-40 mol % of Er 2 O 3 , 5-10 mol % of Gd 2 O 3 , and 5-15 mole % of SiO 2 . 
     
     
         15 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings comprises one or more of Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 , Nd 2 O 3 , or a ceramic compound comprising Y 4 Al 2 O 9  and a solid-solution of Y 2 O 3 —ZrO 2 . 
     
     
         16 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings ceramic coating comprises Y 2 O 3  and YF 3 . 
     
     
         17 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings has a thickness from about 20 micrometers to about 500 micrometers. 
     
     
         18 . The method of  claim 11 , wherein the second ceramic coating has a surface roughness of the ceramic coating is from about 100 micro-inches to about 300 micro-inches. 
     
     
         19 . The method of  claim 11 , wherein at least one of the first or second ceramic coatings has a porosity of the ceramic coating is less than about 1%. 
     
     
         20 . The method of  claim 11 , wherein the article is a chamber component selected from a group consisting of a substrate support assembly, an electrostatic chuck, a ring, a chamber wall, a base, a gas distribution plate, a showerhead, a liner, a liner kit, a shield, a plasma screen, a flow equalizer, a cooling base, a chamber viewport, a chamber lid, a nozzle, or a process kit ring.