Inventor · disambiguated record
Wensheng Yin
Also filed as: YIN WENSHENG
23 granted patents·3 pending applications·22 citations·filing 2005–2020
91Inventor score
Top patents by PatentIndex Score
26 records- 0173US9879979B2Heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Jan 30, 2018·4 cites·9 claims
- 0273US7339289B2Synchronous permanent magnet planar motorUNIV TSINGHUA·Filed 2005·Granted Mar 4, 2008·8 cites·8 claims
- 0372US12270645B2High-resolution phase detection method and system based on plane grating laser interferometerUNIV TSINGHUA·Filed 2020·Granted Apr 8, 2025·1 cites·6 claims
- 0466US8599361B2Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereofZHU YU·Filed 2011·Granted Dec 3, 2013·1 cites·3 claims
- 0566US8284380B2Dual-stage switching system for lithographic machineZHU YU·Filed 2008·Granted Oct 9, 2012·2 cites·5 claims
- 0666US8084897B2Micro stage with 6 degrees of freedomZHU YU·Filed 2008·Granted Dec 27, 2011·2 cites·1 claims
- 0763US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0857US9885556B2Dual-frequency grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Feb 6, 2018·1 cites·8 claims
- 0956US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 1048US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 1144US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 1243US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 1343US9310797B2Single degree of freedom vibration isolating device of linear motor and motion control method thereofUNIV TSINGHUA·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 1442US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 1542US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 1642US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 1741US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 1840US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 1940US9310782B2Method for measuring displacement of planar motor rotorSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Apr 12, 2016·0 cites·3 claims
- 2037US11022423B2Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement systemUNIV TSINGHUA·Filed 2018·Granted Jun 1, 2021·0 cites·2 claims
- 2136US7259380B2Scanning mechanism of an ion implanterUNIV TSINGHUA·Filed 2005·Granted Aug 21, 2007·0 cites·12 claims
- 2235US9030648B2Dual wafer stage exchanging system for lithographic deviceZHU YU·Filed 2010·Granted May 12, 2015·0 cites·4 claims
- 2335US8860927B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Oct 14, 2014·0 cites·4 claims
- 2435US8836918B2Dual-stage exchange system for lithographic apparatusZHU YU·Filed 2010·Granted Sep 16, 2014·0 cites·6 claims
- 2534US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
- 2630US9455650B2Two-dimensional locating method of motion platform based on magnetic steel arrayHU JINCHUN·Filed 2011·Granted Sep 27, 2016·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →