Inventor · disambiguated record
Byung-Am Lee
Also filed as: LEE BYUNG-AM
7 granted patents·6 pending applications·70 citations·filing 1997–2008
84Inventor score
Top patents by PatentIndex Score
13 records- 0182US6528333B1Method of and device for detecting micro-scratchesSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Mar 4, 2003·28 cites·18 claims
- 0276US6449037B2Method of and device for detecting micro-scratchesSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Sep 10, 2002·19 cites·4 claims
- 0370US7339663B2Method and apparatus for classifying repetitive defects on a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 4, 2008·5 cites·25 claims
- 0451US7235411B2Method for aligning a wafer and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 26, 2007·3 cites·12 claims
- 0548US7155366B2Apparatus and method for inspecting patterns on wafersSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Dec 26, 2006·3 cites·22 claims
- 0648US2007252993A1Wafer alignment apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 0747US7205543B2Auto focusing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Apr 17, 2007·1 cites·28 claims
- 0846US2008237461A1Autofocus method in a scanning electron microscopeSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0943US5953579AIn-line test of contact opening of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Sep 14, 1999·11 cites·8 claims
- 1038US2005141761A1Method and apparatus for measuring dimensions of a pattern on a semiconductor deviceFiled 2004·Application pending·0 cites
- 1137US2006013092A1Method and apparatus for aligning a substrate, method and apparatus for inspecting a defect on a substrate using the aligning method and apparatusLEE SUNG-MAN·Filed 2005·Application pending·0 cites
- 1235US2008037857A1Method of classifying directional defects on an object and apparatus for performing the sameLIM YOUNG-KYU·Filed 2007·Application pending·0 cites
- 1334US2007031982A1Method of classifying defects and apparatus for performing the methodLIM YOUNG-KYU·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →