Inventor · disambiguated record
Jeff Tobin
Also filed as: TOBIN JEFF
12 granted patents·1 pending application·1,852 citations·filing 1999–2016
94Inventor score
Top patents by PatentIndex Score
13 records- 0198US7790633B1Sequential deposition/anneal film densification methodNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 7, 2010·643 cites·23 claims
- 0298US7482247B1Conformal nanolaminate dielectric deposition and etch bag gap fill processNOVELLUS SYSTEMS INC·Filed 2006·Granted Jan 27, 2009·583 cites·27 claims
- 0398US7148155B1Sequential deposition/anneal film densification methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Dec 12, 2006·416 cites·34 claims
- 0493US7297608B1Method for controlling properties of conformal silica nanolaminates formed by rapid vapor depositionNOVELLUS SYSTEMS INC·Filed 2004·Granted Nov 20, 2007·68 cites·32 claims
- 0590US7202185B1Silica thin films produced by rapid surface catalyzed vapor deposition (RVD) using a nucleation layerNOVELLUS SYSTEMS INC·Filed 2004·Granted Apr 10, 2007·48 cites·37 claims
- 0689US7097878B1Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 29, 2006·35 cites·19 claims
- 0781US7271112B1Methods for forming high density, conformal, silica nanolaminate films via pulsed deposition layer in structures of confined geometryNOVELLUS SYSTEMS INC·Filed 2004·Granted Sep 18, 2007·25 cites·17 claims
- 0877US7294583B1Methods for the use of alkoxysilanol precursors for vapor deposition of SiO2 filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Nov 13, 2007·18 cites·23 claims
- 0971US7223707B1Dynamic rapid vapor deposition process for conformal silica laminatesNOVELLUS SYSTEMS INC·Filed 2004·Granted May 29, 2007·10 cites·36 claims
- 1053US10020187B2Apparatus and methods for backside passivationHAWRYLCHAK LARA·Filed 2013·Granted Jul 10, 2018·0 cites·10 claims
- 1143US2016215392A1Injector For Spatially Separated Atomic Layer Deposition ChamberAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 1229US6314885B1Imposition proofingIRIS GRAPHICS INC·Filed 1999·Granted Nov 13, 2001·4 cites·44 claims
- 1327US6299160B1Imposition proofingIRIS GRAPHICS INC·Filed 1999·Granted Oct 9, 2001·2 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →