Assignee
SAKAMOTO NORITOSHI
JP·3 granted patents·11 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0188US8149423B2Position detection apparatus, exposure apparatus, and method of manufacturing deviceSAKAMOTO NORITOSHI·Filed 2010·Granted Apr 3, 2012·11 cites·6 claims
- 0247US8259310B2Position detection apparatus, exposure apparatus, and method of manufacturing deviceSAKAMOTO NORITOSHI·Filed 2012·Granted Sep 4, 2012·0 cites·5 claims
- 0341US9036131B2Exposure apparatus and device fabrication methodSAKAMOTO NORITOSHI·Filed 2012·Granted May 19, 2015·0 cites·21 claims
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