Assignee
NOBORU MICHIO
JP·1 granted patent·1 pending application·5 citations·filing 2008–2012
Top patents by PatentIndex Score
2 records- 0170US8139199B2Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing methodNOBORU MICHIO·Filed 2008·Granted Mar 20, 2012·5 cites·56 claims
- 0242US2012176590A1Exposure Method, Exposure Apparatus, Light Converging Pattern Formation Member, Mask, and Device Manufacturing MethodNOBORU MICHIO·Filed 2012·Application pending·0 cites
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