Assignee
MIZUTA MASASHI
JP·1 granted patent·1 pending application·0 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0132US9273396B2Vapor deposition apparatus and method associatedMIZUTA MASASHI·Filed 2012·Granted Mar 1, 2016·0 cites·12 claims
- 0230US2014144381A1Method for washing semiconductor manufacturing apparatus component, apparatus for washing semiconductor manufacturing apparatus component, and vapor phase growth apparatusMIZUTA MASASHI·Filed 2012·Application pending·0 cites
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