Assignee
MATSUI HIROYUKI
JP·4 granted patents·1 pending application·9 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0179US9202665B2Charged particle beam apparatus for removing charges developed on a region of a sampleMATSUI HIROYUKI·Filed 2011·Granted Dec 1, 2015·5 cites·17 claims
- 0269US8490857B2Reflow apparatus, a reflow method, and a manufacturing method of a semiconductor deviceMATSUI HIROYUKI·Filed 2012·Granted Jul 23, 2013·2 cites·5 claims
- 0362US8302843B2Process for producing semiconductor device and apparatus thereforMATSUI HIROYUKI·Filed 2009·Granted Nov 6, 2012·2 cites·5 claims
- 0448US8336756B2Reflow apparatus, a reflow method, and a manufacturing method of semiconductor deviceMATSUI HIROYUKI·Filed 2006·Granted Dec 25, 2012·0 cites·11 claims
- 0547US2012251968A1Process for producing semiconductor device and apparatus thereforMATSUI HIROYUKI·Filed 2012·Application pending·0 cites
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