Assignee
ITO YOSHITAKE
3 granted patents·1 pending application·21 citations·filing 2003–2006
Top patents by PatentIndex Score
4 records- 0177US7338223B2Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processingITO YOSHITAKE·Filed 2006·Granted Mar 4, 2008·7 cites·15 claims
- 0271US7290948B2Substrate processing apparatus and substrate processing methodITO YOSHITAKE·Filed 2006·Granted Nov 6, 2007·4 cites·26 claims
- 0364US7077585B2Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processingITO YOSHITAKE·Filed 2003·Granted Jul 18, 2006·10 cites·20 claims
- 0447US2007098401A1Substrate processing method and apparatus thereofITO YOSHITAKE·Filed 2006·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →