Assignee
HU XIAOYUAN
US·0 granted patents·2 pending applications·0 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0138US2012034845A1Techniques for matching measured spectra to reference spectra for in-situ optical monitoringHU XIAOYUAN·Filed 2011·Application pending·0 cites
- 0236US2012003759A1Endpoint control during chemical mechanical polishing by detecting interface between different layers through selectivity changeHU XIAOYUAN·Filed 2011·Application pending·0 cites
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