Assignee
EGTM CO LTD
KR·8 granted patents·17 pending applications·2 citations·filing 2020–2025
Top patents by PatentIndex Score
25 records- 0187US11634441B2Group 5 metal compound for thin film deposition and method of forming group 5 metal-containing thin film using sameEGTM CO LTD·Filed 2021·Granted Apr 25, 2023·2 cites·2 claims
- 0279US2026090295A1Method of depositing thin film and method of manufacturing memory device including the sameEGTM CO LTD·Filed 2025·Application pending·0 cites
- 0377US2026062429A1Aluminum precursor, method of forming a thin layer using the same, method of manufacturing the same, and method of manufacturing memory deviceEGTM CO LTD·Filed 2025·Application pending·0 cites
- 0472US2026062804A1Method of treating thin films and method of manufacturing memory deviceEGTM CO LTD·Filed 2025·Application pending·0 cites
- 0565US12421605B2Method for areal selective forming of thin filmEGTM CO LTD·Filed 2024·Granted Sep 23, 2025·0 cites·13 claims
- 0665US2026015715A1Vanadium precursor compound for thin film deposition and method of forming thin film containing vanadium using the sameEGTM CO LTD·Filed 2025·Application pending·0 cites
- 0764US2023287014A1Aluminum precursor, method of forming a thin layer using the same, method of manufacturing the same, and method of manufacturing memory deviceEGTM CO LTD·Filed 2023·Application pending·0 cites
- 0859US11926897B2Niobium precursor compound for thin film deposition and method for forming niobium-containing thin film using sameEGTM CO LTD·Filed 2022·Granted Mar 12, 2024·0 cites·17 claims
- 0958US2025257462A1Method of treating thin films and method of manufacturing memory deviceEGTM CO LTD·Filed 2025·Application pending·0 cites
- 1057US2024194481A1Method of forming thin film using material of chemical purgeEGTM CO LTD·Filed 2023·Application pending·0 cites
- 1156US12281130B2Organometallic precursor compoundEGTM CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·3 claims
- 1256US12247289B2Method for forming thin film using surface protection materialEGTM CO LTD·Filed 2020·Granted Mar 11, 2025·0 cites·4 claims
- 1356US11958874B2Organo tin compound for thin film deposition and method for forming tin-containing thin film using sameEGTM CO LTD·Filed 2022·Granted Apr 16, 2024·0 cites·9 claims
- 1456US2023339985A1Organometallic Compound For Thin Film Deposition And Method For Forming Group 4 Metal-Containing Thin Film Using SameEGTM CO LTD·Filed 2023·Application pending·0 cites
- 1556US2025376764A1Compound for forming molybdenum-containing thin film, molybdenum-containing thin film and manufacturing method thereofEGTM CO LTD·Filed 2025·Application pending·0 cites
- 1655US12252781B2Area-selective method for forming thin film by using nuclear growth retardationEGTM CO LTD·Filed 2022·Granted Mar 18, 2025·0 cites·30 claims
- 1755US2025201549A1Precursor for forming silicon-containing thin film with high hardness and low dielectric constant and manufacturing method for silicon-containing thin film using thereofEGTM CO LTD·Filed 2024·Application pending·0 cites
- 1854US2023307226A1Method of depositing thin film and method of manufacturing memory device including the sameEGTM CO LTD·Filed 2023·Application pending·0 cites
- 1950US2022333243A1Method for forming metal nitride thin filmEGTM CO LTD·Filed 2020·Application pending·0 cites
- 2050US2025285886A1Method of treating thin films and method of manufacturing memory deviceEGTM CO LTD·Filed 2025·Application pending·0 cites
- 2147US2022112600A1Method of depositing thin films using protective materialEGTM CO LTD·Filed 2021·Application pending·0 cites
- 2246US11591691B2Method of forming a thin film using a surface protection materialEGTM CO LTD·Filed 2020·Granted Feb 28, 2023·0 cites·8 claims
- 2346US2023366080A1Method for forming region-selective thin film using selectivating agentEGTM CO LTD·Filed 2021·Application pending·0 cites
- 2445US2025246438A1Method of treating thin films and method of manufacturing memory deviceEGTM CO LTD·Filed 2025·Application pending·0 cites
- 2544US2023057512A1Method for forming thin film using surface protection materialEGTM CO LTD·Filed 2020·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →