Assignee
SHIGETA ATSUSHI
0 granted patents·3 pending applications·0 citations·filing 2005–2010
Top patents by PatentIndex Score
3 records- 0149US2006019417A1Substrate processing method and substrate processing apparatusSHIGETA ATSUSHI·Filed 2005·Application pending·0 cites
- 0247US2010255757A1Substrate processing method and substrate processing apparatusSHIGETA ATSUSHI·Filed 2010·Application pending·0 cites
- 0347US2008254719A1Substrate processing methodSHIGETA ATSUSHI·Filed 2008·Application pending·0 cites
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