P
USRE50796EActiveUtilityPatentIndex 62

Semiconductor package having spacer layer

Assignee: EXO IMAGING INCPriority: Oct 31, 2011Filed: Apr 27, 2022Granted: Feb 10, 2026
Est. expiryOct 31, 2031(~5.3 yrs left)· nominal 20-yr term from priority
Inventors:TEH WENG HONGGUZEK JOHN SZHONG SHAN
H10W 72/851H10W 90/724H10W 72/252H10W 72/248H10W 90/722H10W 90/701H10W 90/231H10W 90/20H10W 74/114H10W 72/823H10W 74/117H10W 70/685H10W 70/635H10W 70/614H10W 70/69H10W 70/68H10W 70/65H10W 70/60H10W 90/00H01L 2924/00H01L 2924/1461H01L 2924/00014H01L 2224/13147H01L 2225/06575H01L 2225/06555H01L 2225/06548H01L 2225/06513H01L 2224/73H01L 2224/16227H01L 2224/16225H01L 2224/14181H01L 23/49816H01L 23/3121H01L 25/105H01L 23/5389H01L 23/49894H01L 23/49838H01L 23/49827H01L 23/49822H01L 23/498H01L 23/3128H01L 23/13H01L 23/12H01L 25/0657
62
PatentIndex Score
0
Cited by
59
References
21
Claims

Abstract

Package assemblies for and methods of packaging integrated circuit chips are described. Disclosed package assemblies have spacers and recessed regions comprising IC chips. Architectural structures are provided that enable, for example, three dimensional (3D) packaging (or system in package (SiP) or multi-chip modules), systems-on-chip 3D packaging, and hybrid 3D bonding. Embodiments of the invention can be used, for example, to create logic-to-memory, memory-to-memory, and logic-to-logic interface stacking assemblies.

Claims

exact text as granted — not AI-modified
We claim: 
     
         1 . A device comprising:
 a packaging substrate having a surface wherein the surface has a recess formed therein;   a first integrated circuit die disposed in the recess of the packaging substrate wherein the first integrated circuit die has a surface;   a raised patterned layer disposed on the surface of the packaging substrate, the raised patterned layer comprising a dielectric material; and   a second integrated circuit die disposed directly on the raised patterned layer creating a cavity that is bordered defined at least partially by an inner surface of the raised patterned layer, the surface of the packaging substrate, and a surface of the second integrated circuit diethat faces the surface of the first integrated circuit die.   
     
     
         2 . The device of  claim 1  wherein the first integrated circuit die also comprises a spacer layer disposed on the surface of the first integrated circuit die. 
     
     
         3 . The device of  claim 1  wherein the packaging substrate is a careless coreless packaging substrate. 
     
     
         4 . The device of  claim 1  wherein the packaging substrate is comprised of built-up layers of dielectric and conducting materials. 
     
     
         5 . The device of  claim 1  wherein the cavity is a region having an airtight seal. 
     
     
         6 . The device of  claim 1  wherein the first integrated circuit die is fully embedded in the packaging substrate. 
     
     
         7 . The device of  claim 1  wherein the cavity comprises sensors or actuators that are electrically coupled to the package substrate. 
     
     
         8 . The device of  claim 7  wherein the sensors or actuators are selected from the group consisting of mems RF switches, cantilever-based sensors, accelerometers, gyroscopes, oscillators, pizeoresistive piezoresistive sensors, passives, RFID systems, antennas, and or GPS systems. 
     
     
         9 . The device of  claim 1 , further comprising an interconnect region directly electrically connecting the first integrated circuit die and the second integrated circuit die. 
     
     
         10 . A device comprising:
 a mainboard assembly having a first side, wherein the mainboard assembly has a package assembly disposed on the first side and the package assembly comprises:
 a packaging substrate having a surface wherein the surface has a recess formed therein; 
 a first integrated circuit die disposed in the recess of the packaging substrate wherein the first integrated circuit die has a surface; 
 a raised patterned layer disposed on the surface of the packaging, the raised patterned layer comprising a dielectric material; and 
 a second integrated circuit die disposed directly on the raised patterned layer creating a cavity that is bordered by an inner surface of the raised patterned layer and a surface of the second integrated circuit die that faces the surface of the first integrated circuit die. 
   
     
     
         11 . The device of  claim 10  wherein the packaging substrate is a careless coreless packaging substrate. 
     
     
         12 . The device of  claim 10  wherein the mainboard assembly has a second side, wherein the mainboard assembly has one or more additional devices disposed on the first or second side, and wherein the one or more additional devices are selected from the group consisting of processing devices, memory devices, signal processing devices, wireless communication devices, graphics controllers, input/output controllers, audio processors, power delivery components, and power management components. 
     
     
         13 . The device of  claim 10 , further comprising an interconnect region directly electrically connecting the first integrated circuit die and the second integrated circuit die. 
     
     
         14 . A device comprising:
 a packaging substrate having a surface wherein the surface has a recess formed therein;   a first integrated circuit die disposed in the recess of the packaging substrate wherein the first integrated circuit die has a surface;   a raised spacer layer disposed on the surface of the first integrated circuit die, the raised spacer layer having a bottom surface below the surface of the packaging substrate, and the raised spacer layer having a top surface above the surface of the packaging substrate, the raised spacer layer comprising a dielectric material; and   a second integrated circuit die having a surface, the surface of the second integrated circuit die disposed directly on the raised spacer layer creating a cavity that is bordered by an inner surface of the raised spacer layer and the surface of the second integrated circuit die.   
     
     
         15 . The device of  claim 14 , further comprising an interconnect region directly electrically connecting the first integrated circuit die and the second integrated circuit die. 
     
     
         16 . The device of  claim 14  wherein the packaging substrate is a careless coreless packaging substrate. 
     
     
         17 . The device of  claim 14  wherein the packaging substrate is comprised of built-up layers of dielectric and conducting materials. 
     
     
         18 . The device of  claim 14  wherein the cavity is a region having an airtight seal. 
     
     
         19 . The device of  claim 14  wherein the first integrated circuit die is fully embedded in the packaging substrate. 
     
     
         20 . The device of  claim 14  wherein the cavity comprises sensors or actuators that are electrically coupled to the package substrate. 
     
     
         21 . A device comprising:
 a packaging substrate having a surface wherein the surface has a recess formed therein;   a first integrated circuit die disposed in the recess of the packaging substrate wherein the first integrated circuit die has a surface;   a raised spacer layer disposed on the surface of the first integrated circuit die, the raised spacer layer having a bottom surface below the surface of the packaging substrate, and the raised spacer layer having a top surface above the surface of the packaging substrate; and   a second integrated circuit die having a surface, the surface of the second integrated circuit die disposed directly on the raised spacer layer creating a cavity that is bordered by an inner surface of the raised spacer layer and the surface of the second integrated circuit die, wherein the cavity comprises sensors or actuators that are electrically coupled to the package substrate.

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