Vertical-type non-volatile memory devices having dummy channel holes

Abstract

A vertical-type nonvolatile memory device is provided in which differences between the sizes of channel holes in which channel structures are formed are reduced. The vertical-type nonvolatile memory device includes a substrate having channel hole recess regions in a surface thereof. Channel structures vertically protrude from the surface of the substrate on ones of the channel hole recess regions, and memory cell stacks including insulating and conductive layers are alternately stacked along sidewalls of the channel structures. A common source line extends along the surface of the substrate on other ones of the channel hole recess regions in a word line recess region, which separates adjacent memory cell stacks. Related fabrication methods are also discussed.

What is claimed is: 
     
       1. A vertical-type nonvolatile memory device, comprising:
 a substrate; 
 a channel structure extending in a first direction perpendicular to the substrate; 
 a plurality of memory cell stacks respectively comprising a ground selection line, a plurality of word lines, and a string selection line, wherein the ground selection line, the plurality of word lines, and the string selection line are sequentially stacked so as to be separate from each other on a side surface of the channel structure in the first direction; 
 a common source region on a first surface of the substrate between ones of the plurality of memory cell stacks; 
 a recess region, which has a bottom corresponding to a second surface lower than the first surface of the substrate, in the substrate, the recess region comprising a first channel material layer therein; and 
 a dummy channel structure contacting a sidewall of the common source region and overlapping a portion of an upper surface of the first channel material layer in the first direction. 
 
     
     
       2. The vertical-type nonvolatile memory device of  claim 1 , wherein the upper surface of the first channel material layer is higher than an upper surface of the substrate on which the common source region is provided. 
     
     
       3. The vertical-type nonvolatile memory device of  claim 1 , wherein the first channel material layer contacts the sidewall of the common source region. 
     
     
       4. The vertical-type nonvolatile memory device of  claim 1 , wherein a channel hole recess region, which is lower than the bottom of the recess region, is provided on the substrate. 
     
     
       5. A vertical-type nonvolatile memory device, comprising:
 a substrate; 
 a channel structure extending from the substrate in a first direction perpendicular to the substrate; 
 a plurality of memory cell stacks respectively comprising a ground selection line, a plurality of word lines, and a string selection line, wherein the ground selection line, the plurality of word lines, and the string selection line are sequentially stacked so as to be separate from each other on a side surface of the channel structure in the first direction; 
 a common source word line recess region on a first surface of the substrate between ones of the plurality of memory cell stacks, wherein the first surface is lower than an upper surface of the substrate; and 
 a channel hole recess region, which has a bottom corresponding to a second surface lower than the first surface of the substrate, in the substrate, and further comprising: a channel hole recess region, which is lower than the bottom of the recess region, on the substrate; or a channel hole protruding portion, which is higher than the bottom of the recess region and is lower than an upper surface of the substrate, on the substrate. 
 
     
     
       6. A vertical-type nonvolatile memory device, comprising:
 a substrate; 
 a channel structure extending from the substrate in a first direction perpendicular to the substrate; 
 a plurality of word lines sequentially stacked so as to be spaced apart from each other along a side surface of the channel structure in the first direction; 
 a common source word line recess region between stacks of having a first width to separate the plurality of word lines into a first stack of the plurality of word lines and a second stack of the plurality of word lines; and 
 at least one dummy channel structure adjacent a sidewall of the common source word line recess region, wherein the at least one dummy channel structure is disposed between the channel structure and the common source word line recess region, wherein a distance between the at least one dummy channel structure and the channel structure on a word line closest to the at least one dummy channel structure is larger than a distance between the channel structure and another channel structure on the word line wherein the at least one dummy channel structure comprises a plurality of dummy channel structures each having a respective width that is less than the first width and that are disposed consecutively in a line along the word line recess region in a second direction perpendicular to the first direction. 
 
     
     
       7. The vertical-type nonvolatile memory device of  claim 6 , wherein the at least one dummy channel structure comprises a plurality of dummy channel structures that are disposed in a line in a second direction perpendicular to the first direction. 
     
     
       8. The vertical-type nonvolatile memory device of  claim 6  A vertical-type nonvolatile memory device, comprising:
 a substrate; 
 a channel structure extending from the substrate in a first direction perpendicular to the substrate; 
 a plurality of word lines sequentially stacked spaced apart from each other along a side surface of the channel structure in the first direction; 
 a word line recess region having a first width to separate the plurality of word lines into a first stack of the plurality of word lines and a second stack of the plurality of word lines; and 
 at least one dummy channel structure adjacent a sidewall of the word line recess region, wherein the at least one dummy channel structure is disposed between the channel structure and the word line recess region wherein the at least one dummy channel structure comprises a plurality of dummy channel structures each having a respective width that is less than the first width, and wherein the at least one dummy channel structure comprises a channel layer and a charge storage layer, wherein a surface of the at least one dummy channel structure, which faces the common source word line recess region, is covered with a blocking insulating layer. 
 
     
     
       9. The vertical-type nonvolatile memory device of  claim 6 , wherein the at least one dummy channel structure comprises a dummy hole defining an unobstructed space therein. 
     
     
       10. The vertical-type nonvolatile memory device of  claim 6 , wherein an inside of the at least one dummy channel structure comprises an insulating material. 
     
     
       11. The vertical-type nonvolatile memory device of  claim 10 , further comprising a plurality of word line contacts on the plurality of word lines and connected to the plurality of word lines, respectively, wherein the dummy channel structure is disposed adjacent a periphery of the plurality of word line contacts. 
     
     
       12. The vertical-type nonvolatile memory device of  claim 6 , wherein the common source word line recess region is on a first surface of the substrate, and the at least one dummy channel structure is on a second surface having a level that is different from that of the first surface of the substrate. 
     
     
       13. A vertical-channel nonvolatile memory device, comprising:
 a substrate including channel hole recess regions in a surface thereof; 
 channel structures vertically protruding from the surface of the substrate on ones of the channel hole recess regions; 
 memory cell stacks comprising insulating and conductive layers alternately stacked along sidewalls of the channel structures; and 
 a common source line extending along the surface of the substrate on other ones of the channel hole recess regions in a word line recess region that separates adjacent ones of the memory cell stacks, 
 wherein a distance between the ones of the channel hole recess regions having the channel structures thereon and the other ones of the channel hole recess regions immediately adjacent thereto is greater than a distance between the ones of the channel hole recess regions immediately adjacent one another. 
 
     
     
       14. The device of  claim 13 , further comprising:
 non-functional channel contact structures comprising a channel material layer in the other ones of the channel hole recess regions. 
 
     
     
       15. The device of  claim 14 , further comprising:
 non-functional dummy channel structures vertically protruding from the substrate surface on the other ones of the channel hole recess regions adjacent sidewalls of the common source line. 
 
     
     
       16. The device of  claim 13 , wherein respective surfaces of the word line recess region and the other ones of the channel hole recess regions are non-coplanar. 
     
     
       17. A vertical-type nonvolatile memory device, comprising:
 a substrate extending in a first direction and in a second direction;   a first word line plate extending in the first and second directions on the substrate;   a second word line plate extending in the first and second directions on the substrate, the second word line plate spaced apart from the first word line plate in the first direction;   a plurality of first vertical channel structures aligned with one another in the second direction in the first word line plate;   a plurality of second vertical channel structures aligned with one another in the second direction in the second word line plate and directly adjacent to the plurality of first vertical channel structures; and   a word line recess region extending in the second direction to separate the first and second word line plates from one another and to alternatingly intersect one of the plurality of first vertical channel structures and one of the plurality of second vertical channel structures.   
     
     
       18. A vertical-type nonvolatile memory device, comprising:
 a substrate extending in a first direction and in a second direction;   a first word line plate extending in the first and second directions on the substrate;   a second word line plate extending in the first and second directions on the substrate, the second word line plate spaced apart from the first word line plate in the first direction;   a plurality of first vertical channel structures in the first word line plate aligned with one another in a diagonal direction relative to the first and second directions;   a plurality of second vertical channel structures in the second word line plate aligned with one another in the diagonal direction; and   a word line recess region extending in the second direction to separate the first and second word line plates from one another and to intersect ones of the plurality of first vertical channel structures and ones of the plurality of second vertical channel structures that are directly adjacent to one another,   wherein the intersected ones of the plurality of first vertical channel structures and intersected ones of the plurality of second vertical channel structures are semi-circular from a plan view, and other ones of the plurality of first vertical channel structures and plurality of second vertical channel structures are not intersected by the word line recess region and are circular from a plan view.   
     
     
       19. A vertical-type nonvolatile memory device, comprising:
 a substrate extending in a first direction and in a second direction;   a first word line plate extending in the first and second directions on the substrate;   a second word line plate extending in the first and second directions on the substrate, the second word line plate spaced apart from the first word line plate in the first direction;   a plurality of first vertical channel structures aligned with one another in the second direction in first word line plate;   a plurality of second vertical channel structures aligned with one another in the second direction in the second word line plate, the plurality of second vertical channel structures directly adjacent to the plurality of first vertical channel structures and the plurality of second vertical channel structures offset from the plurality of first vertical channel structures in the second direction; and   a word line recess region extending in the second direction to separate the first and second word line plates from one another, wherein the word line recess region intersects the plurality of first vertical channel structures and the plurality of second vertical channel structures.   
     
     
       20. The vertical-type nonvolatile memory device of claim 19 wherein the word line recess region includes an insulating material. 
     
     
       21. The vertical-type nonvolatile memory device of claim 19 wherein the first word line plate comprises a plurality of first word line plates vertically stacked on one another and the second word line plate comprises a plurality of second word line plates vertically stacked on one another; and
 wherein the word line recess region extends toward the substrate to separate the plurality of first word line plates from the plurality of second word line plates.   
     
     
       22. The vertical-type nonvolatile memory device of claim 19 wherein the plurality of first vertical channel structures comprises a plurality of first dummy vertical channel structures and the plurality of second vertical channel structures comprises a plurality of second dummy vertical channel structures. 
     
     
       23. The vertical-type nonvolatile memory device of claim 19 wherein each of the plurality of first vertical channel structures comprises a first semi-circular shaped vertical channel structure and wherein each of the plurality of second vertical channel structures comprises a second semi-circular shaped vertical channel structure. 
     
     
       24. The vertical-type nonvolatile memory device of claim 22 wherein each of the first and second dummy vertical channel structures comprises a charge storage layer, wherein a surface facing the word line recess region is covered with a blocking insulating layer. 
     
     
       25. A vertical-type nonvolatile memory device, comprising:
 a substrate extending in a first direction and in a second direction;   a first word line plate extending in the first and second directions on the substrate;   a second word line plate extending in the first and second directions on the substrate, the second word line plate spaced apart from the first word line plate in the first direction;   a plurality of first vertical channel structures aligned with one another in the second direction in first word line plate;   a plurality of second vertical channel structures aligned with one another in the second direction in the second word line plate; and   a word line recess region extending in the second direction to separate the first and second word line plates from one another,   wherein the plurality of first vertical channel structures are directly adjacent to the plurality of second vertical channel structures with the word line recess region therebetween, and the plurality of first vertical channel structures are offset from the plurality of second vertical channel structures in the second direction, and a cross-section of each of the plurality of first vertical channel structures is semicircular in a plan view and a cross-section of each of the plurality of second vertical channel structures is semicircular in the plan view.   
     
     
       26. A vertical-type nonvolatile memory device, comprising:
 a substrate extending in a first direction and in a second direction;   a first word line plate extending in the first and second directions on the substrate;   a second word line plate extending in the first and second directions on the substrate, the second word line plate spaced apart from the first word line plate in the first direction;   a first vertical channel structure and a second vertical channel structure aligned with one another in the second direction in first word line plate;   a third vertical channel structure in the second word line plate; and   a word line recess region extending in the second direction to separate the first and second word line plates from one another,   wherein the first vertical channel structure and the second vertical channel structure contact a first side wall of the word line recess region and the third vertical channel structure contacts a second side wall of the word line recess region that is opposite the first side wall, the third vertical channel structure overlaps the first vertical channel structure and the second vertical channel structure in the first direction, and a cross-section of the first, the second and the third vertical channel structure is semicircular in a plan view.