Solid state imaging device and manufacturing method, and electronic apparatus

Abstract

A solid state imaging device includes a substrate, in which the substrate includes a photoelectric conversion unit that generates a charge according to a light amount of incident light by a pixel unit, an accumulation unit that divides the charge of the pixel unit which is generated in the photoelectric conversion unit and accumulates the charge, a first element isolation unit that is formed at a boundary of the photoelectric conversion unit of the pixel unit, and a second element isolation unit that is formed at a boundary of the accumulation unit of a divided unit of the pixel.

What is claimed is: 
     
       1. An imaging device comprising:
 a plurality of pixels, wherein at least one pixel of the plurality of pixels includes:
 a photoelectric conversion unit that generates a charge for the at least one pixel according to an amount of incident light, 
 a plurality of accumulation units that divides the charge of the at least one pixel generated in the photoelectric conversion unit and accumulates the divided charge, wherein the plurality of accumulation units accumulates the divided charge from the same photoelectric conversion unit of the at least one pixel, 
 a first element isolation unit that is formed at a boundary of the photoelectric conversion unit of the at least one pixel and between a photoelectric conversion unit of an adjacent pixel, and 
 a second element isolation unit that is formed between each accumulation unit of the plurality of accumulation units of the at least one pixel and between another an accumulation unit of an the adjacent pixel. 
 
 
     
     
       2. The imaging device according to  claim 1 ,
 wherein the photoelectric conversion unit is formed on a side of a substrate which is irradiated with the incident light, and 
 the first element isolation unit is formed on the side of the substrate which is irradiated with the incident light. 
 
     
     
       3. The imaging device according to  claim 1 , further comprising a light shielding unit that is arranged on a substrate of the first element isolation unit to shield the incident light. 
     
     
       4. The imaging device according to  claim 1 , wherein a color filter is arranged on a substrate of the photoelectric conversion unit. 
     
     
       5. The imaging device according to  claim 1 , further comprising a lens that is arranged on a substrate of the photoelectric conversion unit to concentrate the incident light to the photoelectric conversion unit. 
     
     
       6. The imaging device of  claim 1 , wherein the plurality of accumulation units is located between the photoelectric conversion unit and a surface side of a substrate containing the at least one pixel. 
     
     
       7. A method of manufacturing an imaging device, comprising:
 forming, on a substrate, a photoelectric conversion unit that generates a charge for a pixel according to an amount of incident light; 
 forming, on the substrate, a plurality of accumulation units that divides the charge of the pixel generated in the photoelectric conversion unit and accumulates the divided charge, wherein the plurality of accumulation units accumulates the divided charge from the same photoelectric conversion unit of the pixel; 
 forming, on the substrate, a first element isolation unit at a boundary of the photoelectric conversion unit of the pixel and between a photoelectric conversion unit of an adjacent pixel; and 
 forming, on the substrate, a second element isolation unit between each accumulation unit of the plurality of accumulation units of the pixel and between another an accumulation unit of an the adjacent pixel. 
 
     
     
       8. The method of manufacturing according to  claim 7 , further comprising:
 forming the photoelectric conversion unit on a side which is irradiated with the incident light, and 
 forming the first element isolation unit on the side which is irradiated with the incident light. 
 
     
     
       9. The manufacturing method according to  claim 7 , further comprising forming a light shielding unit that is arranged on the substrate of the first element isolation unit to shield the incident light. 
     
     
       10. The manufacturing method according to  claim 7 , further comprising forming a color filter on the substrate of the photoelectric conversion unit. 
     
     
       11. The manufacturing method according to  claim 7 , further comprising forming a lens on the substrate of the photoelectric conversion unit to concentrate the incident light to the photoelectric conversion unit. 
     
     
       12. An electronic apparatus comprising:
 a substrate including a plurality of pixels, wherein at least one pixel of the plurality of pixels includes:
 a photoelectric conversion unit that generates a charge for the at least one pixel according to an amount of incident light, 
 a plurality of accumulation units that divides the charge of the at least one pixel generated in the photoelectric conversion unit and accumulates the divided charge, wherein the plurality of accumulation units accumulates the divided charge from the same photoelectric conversion unit of the at least one pixel, 
 a first element isolation unit that is formed at a boundary of the photoelectric conversion unit of the at least one pixel and between a photoelectric conversion unit of an adjacent pixel, and 
 a second element isolation unit that is formed between each accumulation unit of the plurality of accumulation units of the at least one pixel and between another an accumulation unit of an the adjacent pixel. 
 
 
     
     
       13. The electronic apparatus according to  claim 12 ,
 wherein the photoelectric conversion unit is formed on a side of the substrate which is irradiated with the incident light, and 
 the first element isolation unit is formed on the side of the substrate which is irradiated with the incident light. 
 
     
     
       14. The electronic apparatus according to  claim 12 , further comprising a light shielding unit that is arranged on the substrate of the first element isolation unit to shield the incident light. 
     
     
       15. The electronic apparatus according to  claim 12 , further comprising a color filter arranged on the substrate of the photoelectric conversion unit. 
     
     
       16. The electronic apparatus according to  claim 12 , further comprising a lens that is arranged on the substrate of the photoelectric conversion unit to concentrate the incident light to the photoelectric conversion unit. 
     
     
       17. The imaging device according to claim 1, wherein a length of the first element isolation unit is different from a length of the second element isolation unit in a cross-section view. 
     
     
       18. The imaging device according to claim 17, further comprising a color filter including a first color filter corresponding to a first color and a second color filter corresponding to a second color different from the first color, 
       wherein, in the cross-section view,
 the at least one pixel includes a first divided pixel and a second divided pixel divided by the second element isolation unit, 
 the adjacent pixel includes a third divided pixel and a fourth divided pixel divided by the second element isolation unit, 
 the first color filter is disposed over, at least in part, the first divided pixel and the second divided pixel, 
 the second color filter is disposed over, at least in part, the third divided pixel and the fourth divided pixel. 
 
     
     
       19. The imaging device according to claim 18, further comprising a first lens and a second lens, wherein,
 the first lens is disposed over the first color filter, the first divided pixel and the second divided pixel, and   the second lens is disposed over the second color filter, the third divided pixel and the fourth divided pixel.   
     
     
       20. The imaging device according to claim 18, further comprising a light shielding unit disposed at a boundary of the first color filter and the second color filter. 
     
     
       21. The imaging device according to claim 18, wherein
 the at least one pixel includes a fifth divided pixel and a sixth divided pixel,   the first divided pixel, the second divided pixel, the fifth divided pixel and the sixth divided pixel are divided by the second element isolation unit.   
     
     
       22. The imaging device according to claim 18, wherein
 the first color is green color and the second color is blue or red color.