ESD protection device and method for producing the same

Abstract

An ESD protection device is provided which experiences only small increases in discharge start voltage and discharge protection voltage and relatively free of scorching or peeling at the ends of the discharge electrodes thereof even if a discharge repeatedly occurs. The ESD protection device has an insulating substrate with a cavity, and in the cavity first and second discharge electrodes are so disposed that the ends thereof face each other with a gap therebetween. A first outer electrode is on the outer surface of the insulating substrate and electrically connected to the first discharge electrode, and a second outer electrode is on the outer surface of the insulating substrate and electrically connected to the second discharge electrode. The ends of the first and second discharge electrodes are thicker than any other portion of the first and second discharge electrodes.

The invention claimed is: 
     
       1. An ESD protection device comprising:
 an insulating substrate having a cavity therein; 
 first and second discharge electrodes disposed in the cavity of the insulating substrate, ends of the first and second discharge electrodes facing each other with a gap therebetween; 
 a first outer electrode on an outer surface of the insulating substrate, the first outer electrode being electrically connected to the first discharge electrode; and 
 a second outer electrode on the outer surface of the insulating substrate, the second outer electrode being electrically connected to the second discharge electrode, wherein 
 the insulating substrate includes a plurality of substrate layers that are stacked on each other in a stacking direction, and 
 each of the ends end of the first and second discharge electrodes electrode is thicker in the stacking direction of the substrate layers than any other portions of each portion of the first and second discharge electrodes electrode. 
 
     
     
       2. The ESD protection device according to  claim 1 , wherein the insulating substrate is a ceramic multilayer substrate obtained by firing a stack of a plurality of ceramic greensheets. 
     
     
       3. The ESD protection device according to  claim 1 , wherein a height of a lowest portion of a ceiling of the cavity is shorter than a thickness of a thickest portion of each of the ends end of the first and second discharge electrodes electrode when a direction of a thickness of each of the first and second discharge electrodes electrode is defined as a direction of a height of the cavity. 
     
     
       4. The ESD protection device according to  claim 1 , wherein each of the ends of the first and second discharge electrodes has an end face that is straight when viewed from a cross-section including a direction where the ends face each other and the direction of the thickness of each of the first and second discharge electrodes. 
     
     
       5. The ESD protection device according to  claim 1 , further comprising a discharge aid portion being partially overlapped with the first and second discharge electrodes in an area where the first and second discharge electrodes face each other with the gap therebetween, the discharge aid portion containing metal particles and semiconductor particles. 
     
     
       6. The ESD protection device according to  claim 5 , further comprising a sealing layer between the discharge aid portion and the insulating substrate. 
     
     
       7. A method for producing an ESD protection device, comprising:
 preparing a plurality of ceramic greensheets; 
 forming first and second discharge electrodes on at least one of the plurality of ceramic greensheets so that each of ends an end of the first and second discharge electrodes electrode is thicker in a stacking direction of the plurality of ceramic greensheets than in any other portions portion of each of the first and second discharge electrodes electrode; 
 placing plain ones of the plurality of ceramic greensheets on and under the at least one ceramic greensheet having the first and second discharge electrodes formed thereon to make a laminate of the plurality of ceramic greensheets stacked in the stacking direction; 
 firing the laminate to make an insulating substrate having a cavity in which the ends end of the first and discharge electrode faces an end of the second discharge electrodes face each other electrode, and 
 forming first and second outer electrodes electrically connected to the first and second discharge electrodes, respectively. 
 
     
     
       8. The method for producing an ESD protection device according to  claim 7 , wherein forming the first and second discharge electrodes on the at least one ceramic greensheet further includes, before forming the first and second discharge electrodes or after forming the first and second discharge electrodes, supplying a cavity-forming material that is vaporized when fired. 
     
     
       9. The method for producing an ESD protection device according to  claim 7 , wherein the cavity-forming material is so supplied that a height of the cavity-forming material is lower than a thickness of a thickest portion of each of the ends end of the first and second discharge electrodes electrode. 
     
     
       10. The method for producing an ESD protection device according to  claim 7 , wherein forming the first and second discharge electrodes further includes, before forming the first and second discharge electrodes or after forming the first and second discharge electrodes, forming a discharge aid portion being partially overlapped with the first and second discharge electrodes on the at least one ceramic greensheet, wherein the discharge aid portion comprises a metallic material and a semiconductor material dispersed therein. 
     
     
       11. The method for producing an ESD protection device according to  claim 10 , wherein forming the discharge aid portion on the at least one ceramic greensheet includes forming a sealing layer on the at least one ceramic greensheet and forming the discharge aid portion on the sealing layer. 
     
     
       12. The ESD protection device according to claim 1, wherein the end of the second discharge electrode is thicker than any other portion of the second discharge electrode. 
     
     
       13. The method for producing an ESD protection device according to claim 7, wherein an end of the second discharge electrode is thicker than in any other portion of the second discharge electrode.