Multilayer optical fiber coupler

Abstract

A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, including a first layer that has a fiber socket formed by photolithographic masking and etching to extend through said first layer, and a second layer bonded to the first layer. The first layer may comprise substantially single-crystal silicon. An optical fiber is inserted into the fiber socket to align the optical fiber precisely within the fiber socket. In one embodiment the optical fiber is a single mode fiber, and an optical focusing element formed on the second layer is aligned with the core of the single mode fiber. The second layer may comprise glass having an index of refraction that approximately matches the index of the optical fiber, and an optical epoxy is used to affix the optical fiber into the fiber socket and fill the gaps between the end face of the fiber and the second layer. Embodiments are disclosed in which an optical device such as a VCSEL or photodetector is bonded to the second layer. Alternative embodiments are disclosed in which the optical device is incorporated into the second layer. Advantages include reduced cost due to batch fabrication techniques, and passive alignment of the optical fiber.

1. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    wherein said second layer has an index of refraction substantially equal to the index of refraction of the core of said optical fiber.    
     
     
       2. The optical fiber coupler of  claim 1  wherein said optical fiber comprises a single mode optical fiber. 
     
     
       3. The optical fiber coupler of  claim 1  wherein said first layer comprises substantially single-crystal silicon. 
     
     
       4. The optical fiber coupler of  claim 1  wherein said second layer comprises silicon. 
     
     
       5. The optical fiber coupler of  claim 1  wherein said second layer comprises glass. 
     
     
       6. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    an epoxy that fills the gap between the end face of the optical fiber and the adjacent portion of the second layer, said epoxy having an index of refraction that approximately matches the index of the optical fiber so that optical losses are reduced.    
     
     
       7. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    an optical device integrated into said second layer.    
     
     
       8. The optical fiber coupler of  claim 7  wherein said optical device comprises a VCSEL to provide an integrated fiber optic transmitter. 
     
     
       9. The optical fiber coupler of  claim 7  wherein said optical device comprises a photodetector to provide an integrated fiber optic receiver. 
     
     
       10. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer, wherein said second layer comprises an optical focusing element arranged to couple optical radiation with said optical fiber;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    wherein said optical focusing element comprises a gradient-index lens.    
     
     
       11. The optical fiber coupler of  claim 10  wherein said optical focusing element has a focal point for optical radiation from the optical device, said optical fiber includes a core and a cladding surrounding said core, and said focal point is approximately situated along the central axis of said fiber socket, so that the optical radiation is coupled into said core of said optical fiber. 
     
     
       12. The optical fiber coupler of  claim 11  wherein said optical fiber comprises a single mode fiber. 
     
     
       13. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer, wherein said second layer comprises an optical focusing element arranged to couple optical radiation with said optical fiber;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    wherein said optical focusing element comprises a diffractive lens.    
     
     
       14. A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, comprising:
 a first layer, said first layer defining a fiber socket formed by photolithographic masking and etching to extend through said first layer, said fiber socket sized to receive and align said optical fiber therein;    a second layer bonded to said first layer;    said optical fiber having an end section that extends through the fiber socket, said optical fiber terminating at an end face situated approximately adjacent to the second layer, said fiber socket aligning and positioning said optical fiber therein; and    a third layer bonded to said second layer, said third layer comprising an optical device.    
     
     
       15. The optical fiber coupler of  claim 14  wherein said optical device comprises a VCSEL. 
     
     
       16. The optical fiber coupler of  claim 14  wherein said second layer comprises an optical focusing element. 
     
     
       17. The optical fiber coupler of  claim 14  wherein said third layer comprises an optical focusing element. 
     
     
       18. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets;  
 forming a plurality of VCSELs in said second layer in a predetermined configuration corresponding to the configuration of said fiber sockets; and  
 aligning said first layer with said second layer so that said VCSELs are aligned with said fiber sockets, and then performing said step of bonding said first and second layers together to provide said composite wafer.  
 
     
     
       19. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets;  
 forming a plurality of photodetectors in said second layer in a predetermined configuration corresponding to the configuration of said fiber sockets; and  
 aligning said first layer with said second layer so that said photodetectors are aligned with said fiber sockets, and then performing said step of bonding said first and second layers together to provide said composite wafer.  
 
     
     
       20. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets;  
 forming a plurality of optical focusing elements in said second layer in a predetermined configuration corresponding to the configuration of said fiber sockets; and  
 aligning said first layer with said second layer so that said optical focusing elements are aligned with said fiber sockets, and then performing said step of bonding said first and second layers together to provide said composite wafer.  
 
     
     
       21. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of forming said plurality of optical focusing elements comprises forming refractive lenses.  
 
     
     
       22. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of forming said plurality of optical focusing elements comprises forming diffractive lenses.  
 
     
     
       23. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of forming said plurality of optical focusing elements comprises forming gradient-index lenses.  
 
     
     
       24. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said second layer comprises an optical material that has an index of refraction substantially equal to the index of refraction of said optical fiber, and said step of affixing said optical fibers into said fiber sockets includes applying an epoxy that approximately matches the index of refraction of said optical fiber into the fiber sockets to fill the gap between adjacent sections of said second layer and said optical fiber.  
 
     
     
       25. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of bonding said first and second layers comprises anodic bonding.  
 
     
     
       26. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of bonding said first and second layers comprises epoxy bonding.  
 
     
     
       27. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said step of bonding said first and second layers comprises metal solder bonding.  
 
     
     
       28. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 wherein said dicing step comprises cutting partially through said composite wafer, then performing said affixing step to affix optical fibers to said fiber sockets, and then physically separating said composite wafer into chips, each of which comprises one or more optical couplers.  
 
     
     
       29. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
 photolithographically  masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of cylindrical  fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber;  
 bonding said first layer to a second layer together to provide a composite wafer;  
 dicing said composite wafer into a plurality of chips, each chip including one or more fiber sockets;  
 affixing optical fibers into said fiber sockets; and  
 bonding a third layer that comprises an optical device to said second layer.  
 
     
     
       30. A method for making a plurality of monolithic optical fiber couplers that align an optical fiber that have a predetermined diameter, comprising:
   masking and deep reactive ion etching a first layer to form a plurality of through holes through the first layer, thereby forming a plurality of fiber sockets in a predetermined configuration, said fiber sockets having a diameter approximately equal to the diameter of the optical fiber.     
     
     
       31. The method of  claim 30 , further comprising affixing optical fibers into said fiber sockets. 
     
     
       32. The method of  claim 30 , further comprising dicing said first layer into a plurality of chips, said chip including one or more fiber sockets. 
     
     
       33. The method of  claim 32  further comprising affixing optical fibers into said fiber sockets.