Bellows driver slot valve

Abstract

A slot valve assembly ( 10 ) including a housing ( 11 ) having a central opening ( 19 ), a valve plate ( 32 ), a strongback ( 20 ) for carrying the valve plate, a pair of actuators ( 34, 36 ) for raising and lowering the strongback to position the valve plate over opening ( 19 ), and a second set of actuators ( 240 ) for moving valve plate ( 32 ) into seating engagement with housing ( 11 ). Second actuators ( 240 ) are in fluid communication with the working chambers ( 48, 50 ) of the first pair of actuators ( 34, 36 ). First actuators ( 34, 36 ) are located within housing ( 11 ) to give the housing a much shorter height.

What is claimed is:  
     
       1. A slot valve for creating an air tight seal to a vacuum chamber, comprising 
       a valve housing defining a valve chamber, the valve housing having first and second aligned openings for passage of air along a flow path from one side of the valve housing to the other side,  
       a valve holder longitudinally reciprocable within the valve housing between a first holder position remote from said openings and a second holder position between said openings,  
       a valve gate including a seal transversely reciprocable within said holder between a first gate position spaced from said openings and a second gate position sealing off one opening,  
       a first actuator within the valve chamber for moving the valve holder between first and second holder positions, and  
       a second fluid actuator carried on the valve holder for moving the valve gate between first and second gate positions,  
       the first and second actuators being within the valve chamber, and  
       the slot valve having a low profile.  
     
     
       2. The valve of  claim 1 , which  wherein the second fluid actuator further comprises pneumatic means to seat the valve gate into engagement about one of the openings and mechanically biased means to unseat the valve gate out of engagement about said opening. 
     
     
       3. The valve of  claim 2 , wherein the second actuator comprises an expandable bellows chamber mounted at one end to the valve holder and mounted at its other end to the valve gate. 
     
     
       4. The valve of  claim 3 , wherein the first actuator is pneumatically powered to move the valve holder between first and second holder positions. 
     
     
       5. The valve of  claim 4 , and further comprising pneumatic controls for controlling operation of the first and second actuators, the pneumatic controls applying high pressure to the second actuator to seat the valve gate, the high pressure being sufficient to overcome the mechanical biasing force attempting to unseat the valve gate. 
     
     
       6. The valve of  claim 5 , wherein the pneumatic controls are adapted to apply a low pressure to the first actuator to move the valve holder from the first holder position to the second holder position, the first pneumatic actuator including a first working chamber for receiving low pressure air to move the valve holder to the second holder position, the first working chamber of the first actuator and the second actuator being in fluid communication with each other. 
     
     
       7. The valve of  claim 6 , wherein the pneumatic controls are connected to introduce high pressure air through the first working chamber of the first actuator and into the second actuator, to seat the valve gate, and wherein the first actuator includes a second working chamber for receiving low pressure air to move the valve holder to the first holder position, and contact means to prevent the first actuator from moving the valve holder from the second to the first holder position until the high pressure in the first working chamber drops below the low pressure in the second working chamber, allowing time for the mechanical biasing force to unseat the valve gate. 
     
     
       8. The valve of  claim 7 , wherein the mechanical biasing force unseats the valve gate at a pressure between the high and low pressures. 
     
     
       9. The valve of  claim 1 , wherein the valve holder is spaced from the valve housing as the valve holder reciprocates between the first and second positions. 
     
     
       10. A control system for moving a valve gate longitudinally  between first and second holder positions into and out of a flow path and transversely between first and second gate positions into and out of seating engagement with a valve seat, for sealing off the flow path, the control system comprising 
       a first pneumatic actuator for moving the valve gate between the first and second holder positions into and out of the flow path, the first pneumatic actuator including a first working chamber for moving the valve gate from the first to the second holder position into the flow path and a second working chamber for moving the valve gate from the second to the first holder position out of the flow path,  
       a second pneumatic actuator for moving the valve gate into seating engagement with the valve seat,  
       biasing means for biasing the valve gate to unseat from the valve seat, the second pneumatic actuator and the first working chamber of the first pneumatic actuator being in fluid communication with each other,  
       a high pressure source for providing high pressure air to the first working chamber of the first actuator and to the second actuator, and  
       a low pressure source for providing low pressure air to the first and second working chambers of the first actuator,  
       the biasing means applying a force to bias the valve gate to the second gate position,  
       the biasing means being overcome by pressure in the second between the high and low pressures,  
       means to introduce low pressure into the first working chamber to move the valve gate into the second holder position and high pressure into the first working chamber and into the second actuator to overcome the biasing force of the biasing means and seat the valve gate and seal the flow path, and  
       means to introduce low pressure into the second working chamber and vent high pressure from the second actuator and the first working chamber, to first cause the biasing force to overcome the pressure in the second actuator, then causing the valve gate to unseat, and then causing the pressure in the first chamber to drop below the low pressure in the second working chamber, causing the valve gate to move to the first holder position.  
     
     
       11. The control system of  claim 10 , and further comprising a slow start control valve between the high pressure source and the first working chamber, the slow start control valve adapted to deliver low pressure air to the first working chamber for a period of time until the first actuator is fully expanded, and then deliver high pressure air to the first working chamber. 
     
     
       12. The control system of  claim 10 , wherein the biasing means includes s set of coil springs. 
     
     
       13. The control system of  claim 10 , wherein the first actuator includes a piston and a piston rod, and wherein the piston rod is hollow and at one end communicates with the first working chamber and at the other end includes an opening that communicates with the second actuator. 
     
     
       14. The control system of  claim 13 , wherein the valve gate is carried on a valve holder and the valve holder is mounted to the piston rod, and the valve holder includes an internal manifold that provides fluid communication between the piston rod and the second actuator. 
     
     
       15. The control system of  claim 14 , wherein the second pneumatic actuator comprises a bellows chamber mounted at one end to the valve gate and at the other end to the valve holder. 
     
     
       16. A pneumatic slot  valve for sealing off a vacuum chamber, the slot  valve comprising 
       a valve housing defining a valve chamber, the valve housing having first and second aligned openings defining a flow path for the passage of air from one side of the valve housing to the other side.  
       a valve gate movable into and out of seating engagement with the valve housing about the first opening, to seal off the flow path,  
       a first pneumatic actuator within the valve chamber  for moving the valve gate into and out of the flow path, the first pneumatic actuator comprising a linear pneumatic motor having a first working chamber for moving the valve gate into the flow path and a second working chamber for moving the valve gate out of the flow path,  
       a second pneumatic actuator for moving the valve gate into seating engagement with the valve housing about the first opening,  
       a valve holder for carrying the valve gate and the first pneumatic actuator,  
       the second peneumatic actuator being in fluid communication with each other,  
       the second pneumatic actuator including biasing means for unseating the valve gate,  
       a high pressure source in fluid communication with the first working chamber for seating the valve gate,  
       a low pressure source in fluid communication with the first and second working chambers of the first pneumatic actuator, for moving the valve holder into and out of the flow path,  
       wherein the pressure necessary to overcome the biasing force of the biasing means is between the high and low pressures provided by the high and low pressure sources.  
     
     
       17. The slot  valve of  claim 16 , wherein the low pressure source comprises a slow start valve positioned between the high pressure source and the first working chamber, the slow start valve adapted to meter low pressure air to the first working chamber, to move the valve holder into the flow path. 
     
     
       18. The slot  valve of  claim 16 , wherein the first pneumatic actuator includes a piston and a piston rod, and wherein the valve holder is mounted to an end of the piston rod, the piston rod including an inner passageway in fluid communication with the first working chamber and including an opening at one end in fluid communication with the second pneumatic actuator, the valve holder including internal passageways providing fluid communication between the inner passageway of the piston rod and the second pneumatic actuator. 
     
     
       19. A valve for creating an air tight seal to a vacuum chamber, comprising 
       
         a valve housing defining a valve chamber, the valve housing having first and second aligned openings for passage of air along a flow path from one side of the valve housing to the other side,  
       
       
         a valve holder reciprocable within the valve housing between a first holder position remote from said openings and a second holder position between said openings,  
       
       
         a valve gate including a seal transversely reciprocable within said holder between a first gate position spaced from said openings and a second gate position sealing off one opening,  
       
       
         a first actuator for moving the valve holder between first and second holder positions, and  
       
       
         a second fluid actuator carried on the valve holder for moving the valve gate between first and second gate positions, and  
       
       
         the valve having a low profile. 
       
     
     
       20. The valve of  claim 19 , wherein the second fluid actuator further comprises pneumatic means to seat the valve gate into engagement about one of the openings and mechanically biased means to unseat the valve gate out of engagement about said opening. 
     
     
       21. The valve of  claim 20 , wherein the second actuator comprises an expandable bellows chamber mounted at one end to the valve holder and mounted at its other end to the valve gate. 
     
     
       22. The valve of  claim 21 , wherein the first actuator is pneumatically powered to move the valve holder between first and second holder positions. 
     
     
       23. The valve of  claim 22 , and further comprising pneumatic controls for controlling operation of the first and second actuators, the pneumatic controls applying high pressure to the second actuator to seat the valve gate, the high pressure being sufficient to overcome the mechanical biasing force attempting to unseat the valve gate. 
     
     
       24. The valve of  claim 23 , wherein the pneumatic controls are adapted to apply a low pressure to the first actuator to move the valve holder from the first holder position to the second holder position, the first pneumatic actuator including a first working chamber for receiving low pressure air to move the valve holder to the second holder position, the first working chamber of the first actuator and the second actuator being in fluid communication with each other. 
     
     
       25. The valve of  claim 24 , wherein the pneumatic controls are connected to introduce high pressure air through the first working chamber of the first actuator and into the second actuator, to seat the valve gate, and wherein the first actuator includes a second working chamber for receiving low pressure air to move the valve holder to the first holder position, and contact means to prevent the first actuator from moving the valve holder from the second to the first holder position until the high pressure in the first working chamber drops below the low pressure in the second working chamber, allowing time for the mechanical biasing force to unseat the valve gate. 
     
     
       26. The valve of  claim 25 , wherein the mechanical biasing force unseats the valve gate at a pressure between the high and low pressures. 
     
     
       27. The valve of  claim 19 , wherein the valve holder is spaced from the valve housing as the valve holder reciprocates between the first and second positions.