Semiconductor slice cassette transport unit

Abstract

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.

What is claimed is: 
     
       1. An apparatus for transporting semiconductor slice cassettes in a portable carrier between a high contamination area and a low contamination area, said portable carrier having a base carrying the slice cassettes and a cover removably attached to the base, comprising: a housing having a forward portion disposed in the high contamination area and a rear portion positioned in the low contamination area said rear portion isolated from said forward portion by a barrier wall;   said housing having an interior portion in communication with the high contamination area through a first access opening in said forward portion and with the low contamination area through a second access opening in said area portion;   the cover of the portable carrier being sealingly receivable over the first access opening in isolate the interior portion of the housing from the high cotamination area;   means for creating a positive pressure within the portable carrier prior to removing of the cover of the portable carrier from the base;   means for creating a negative pressure within the interior of said housing relative to both the high and low contamination areas;   support means disposed within said housing for receiving the base of the portable carrier and operable to be alternately disposed proximate said first access opening and said second access opening to move the base of the portable carrier and the slice cassettes therebetween; and   motive force means disposed within said housing for causing said support means and at least a portion of the portable carrier to be moved between said first access opening and said second access opening.   
     
     
       2. The apparatus of claim 1 and further comprising arm means pivotally connected between said support means and a pivot point within said housing for moving the carrier about an arc between said first and second access openings. 
     
     
       3. The apparatus of claim 1 wherein said motive force means comprises: a motor;   a drive shaft connected to said motor for rotation thereof; and   drive belt assembly means positioned on opposing sides of said support means for cooperating with said drive shaft to cause vertical and pivotable movement of said support means.   
     
     
       4. The apparatus of claim 3 wherein said drive belt assembly comprises: a first shaft secured within said housing;   a second shaft attached to said support means;   first and second pulleys attached to said first shaft in side-by-side relationships;   a third pulley attached to said second shaft;   a fourth pulley attached to said drive shaft for rotation therewith;   a first belt disposed about said first and fourth pulley; and   a second belt disposed about said second and third pulley.   
     
     
       5. The apparatus of claim 4 and further comprising an enclosure positioned to surround said support means and a portion of said belt drive assemblies containing said second belt, said second and third pulleys and the portion of said second shaft supporting said second belt. 
     
     
       6. The apparatus of claim 4 and further comprising a belt tensioner to prevent said belts from slipping off said pulleys as the pulleys are rotated. 
     
     
       7. The apparatus of claim 5 and further comprising a shroud disposed about said portions of said belt drive assemblies. 
     
     
       8. The apparatus of claim 5 wherein said means for creating a negative pressure within the interior of said housing relative to both the high and low contamination areas comprises an exhaust fan positioned on the bottom inner surface of said housing. 
     
     
       9. The apparatus of claim 8 wherein an aperture is provided at the bottom of said enclosure and extends to the exterior thereof for attachment through a hose to said exhaust fan. 
     
     
       10. The apparatus of claim 8 and further comprising a second exhaust fan positioned on the bottom inner surface of said housing for evacuating particulate contamination therefrom. 
     
     
       11. An apparatus for transporting semiconductor slice cassettes in a portable carrier having a detachable cover and base between a high contamination area and a low contamination area comprising: a housing having a forward portion disposed in the high contamination area and a rear portion positioned in the low contamination area and isolated from said forward portion behind an air drop panel disposed between the high and low contamination areas;   said housing having its interior in communication with the high contamination area through a first access opening in said forward position and with the low contamination area through a second access opening in said rear portion;   said first access opening mating with the cover of the portable carrier to allow the base to pass therethrough and support the cover to seal the interior of the housing from the high contamination area;   support means within said housing for cooperating with the base of the carrier to provide support therefor and adapted to be alternately disposed proximate said first access opening and said second access opening, said support means having:   a guider plate having means positioned thereon to matingly engage with the base of the carrier;   an arm connected to said plate and pivotable about an arc between said forward and rear portions;   means for creating a positive pressure within the portable carrier prior to removing of the cover of the portable carrier from the base;   means for creating a negative pressure within the interior of said housing relative to both the high and low contamination areas;   motive force means disposed within said housing for causing said arm to pivot said support means and the carrier base mounted thereon between said forward portion and said rear portion.   
     
     
       12. The apparatus of claim 11 wherein said means for creating a positive pressure within the portable carrier comprises a fan positioned below said guider plate and attached thereto, said fan encapsulated in a sealed enclosure for directing air towards the base of the portable carrier and to the interior thereof. 
     
     
       13. The apparatus of claim 12 wherein said support means further comprises a tubular spacer positioned between said glider plate and said fan enclosure at the center of said glider plate and extending from said glider plate through said fan enclosure to communicate with a breathing orifice on the base of the portable carrier. 
     
     
       14. The apparatus of claim 11 wherein said glider plate is constructed so as to conform substantially to the base of the carrier and includes apertures which communicate with the breathing orifices on the portable carrier and with an orifice provided at the terminal end of the latch tube of the carrier. 
     
     
       15. The apparatus of claim 12 wherein a plastic strip is provided along the forward edges of said glider plate so that when the base is secured to said glider plate, a gap is formed between the bottom surface of the carrier and the upper surface of the glider plate. 
     
     
       16. The apparatus of claim 13 wherein said fan is adapted to direct air into said carrier through said glider plate and the filters of said carrier to create a positive pressure within said carrier and to also create a negative pressure within the gap between said glider plate and said carrier to prevent introduction of particulate contamination into said carrier when said carrier is opened. .Iadd. 
     
     
       17.  An interface between first and second containers used for semiconductor wafer manufacture, comprising: (a) a first door for sealing the first container;   (b) a second door for sealing the second container;   (c) said first and second doors each having a mating outer surface so that substantially all contamination which has accumulated on exterior surfaces of the doors when the containers are separated will be trapped when the containers are positioned together; and   (d) further including an elevator coupled to said doors for transporting said doors into said containers as a single unit while said doors are coupled together at their mating outer surfaces..Iaddend. .Iadd.   
     
     
       18.  An interface between first and second containers, comprising: (a) a first door for independently sealing the first container;   (b) a second door for independently sealing the second container;   (c) said first and second doors each having a mating outer surface of substantially equal exterior dimensions so that substantially all contamination which has accumulated on the exterior surface of the doors when the containers are separated will be trapped when the containers are positioned together; and   (d) an elevator coupled to said doors for transporting said doors into said containers as a single unit while said doors are coupled together at their mating outer surfaces..Iaddend. .Iadd.19. The interface of claim 18 wherein the first container is isolated from ambient..Iaddend. .Iadd.20. The interface of claim 18 wherein the first container prevents contamination..Iaddend. .Iadd.21. The interface of claim 18 wherein the first container prevents contamination from entering the inside of the container..Iaddend. .Iadd.22. The interface of claim 18 wherein the interface prevents contamination..Iaddend. .Iadd.23. The interface of claim 18 wherein the interface prevents contamination of the inside of the first container..Iaddend. .Iadd.24. The interface of claim 18 wherein the interface prevents contamination of the inside of the second container..Iaddend. .Iadd.25. The interface of claim 18 wherein the first   
     
     
        container is maintained at atmospheric pressure..Iaddend. .Iadd.26.  The interface of claim 18 wherein the first container is maintained at ambient pressure..Iaddend. .Iadd.27. The interface of claim 18 wherein ambient contains particulate contamination..Iaddend. .Iadd.28. The interface of claim 18 wherein wafers are stored in the first container..Iaddend. .Iadd.29. An semiconductor wafer manufacturing system, comprising: (a) a clean carrier;   (b) a base controllably attached to the clean carrier for sealing the clean carrier;   (c) a transport unit;   (d) a glider plate attached to the transport unit;   (e) the base and the glider plate each having a mating outer surface of substantially equal exterior dimensions so that substantially all contamination which has accumulated on the exterior surface of the doors when the carrier and transport unit are separated will be trapped when the base and the glider plate are positioned together; and   (f) a transport mechanism coupled to the glider plate and base for transporting the base and the glider plate into the clean carrier and the transport unit as a single unit while said doors are coupled together at   
     
     
        their mating outer surfaces..Iaddend. .Iadd.30.  A method of interfacing a wafer carrier to a housing, comprising the steps of: (a) providing a door for the wafer carrier;   (b) providing a door for an opening in the housing;   (c) placing the wafer carrier so that its door mates with the housing door; and   (d) trapping particulates located between the two mated doors..Iaddend. .Iadd.31. The method of claim 30 further comprising:   (a) transporting the two mated doors as a unit into the interior of the housing..Iaddend. .Iadd.32. The method of claim 30 further comprising:   (a) using the wafer carrier to cover the housing opening to prevent particulates from entering the housing..Iaddend.