Monolithic microwave wide-band VCO

Abstract

A monolithic microwave voltage-controlled oscillator including one or more FETS integrated with a wide-ratio varactor. The varactor includes interdigitated anode and cathode patterns laid out on a single thin epitaxial layer. The punch through voltage of the epitaxial layer, and hence the resistivity-thickness product of the epitaxial layer, must be low. Since the substrate is semi-insulating, punch through to the substrate does not become uncontrollable, but simply permits modulation of the capacitance over a very wide range. The FETS are formed in the same epitaxial layer with the varactor, and complicated doping profiles are not required.

What we claim is: 
     
       1. A monolithic wideband microwave voltage-controlled oscillator (VCO), comprising: a semi-insulating substrate;   a doped semiconducting layer above said substrate;   an FET comprising a source and drain .Iadd.contacting a channel .Iaddend.in said semiconducting layer, and a gate interposed between said source and said drain;   .[.an input.]. .Iadd.a first .Iaddend.contact connected to one of said source and said drain, and an output contact connected to the other of said source and said drain;   a varactor, comprising a first terminal and second term terminal atop said semiconducting layer, said first terminal forming a barrier contact with said semiconducting layer, the portion of said semiconducting layer beneath said first terminal being sufficiently thin and sufficiently lightly doped that punch through between said first terminal and said substrate occurs at a lower voltage .[.then.]. .Iadd.than .Iaddend.does breakdown between said first terminal and said second terminal; and   means for providing a bias voltage, connected to a first one of said terminals of said varactor, said gate of said FET being direct current connected to the other .[.one.]. of said terminals of said varactor.   
     
     
       2. The VCO of claim 1, wherein said semi-insulating substrate comprises a chromium-doped gallium arsenide. 
     
     
       3. The VCO of claim 2, wherein said doped semiconducting layer comprises n-type gallium arsenide. 
     
     
       4. The VCO of claim 3, wherein said doped semiconducting layer is less than one-half micron thick. 
     
     
       5. The VCO of claim 1, wherein said output contact is connect to said source. 
     
     
       6. The VCO of claim 5, wherein said source and drain each comprise respective pluralities of fingers, and said drain comprises a larger number of said fingers than does said source. 
     
     
       7. The VCO of claim 6, further comprising a capacitor including a first and second metal plates and a dielectric therebetween, said first plate of said capacitor being connected to said other one of said anode and said cathode of said varactor, and said second metal plate of said capacitor being connected to said drain of said FET. 
     
     
       8. The VCO of claim 7, further comprising an inductance interposed between said gate of said FET and said other one of said anode and said cathode of said varactor. 
     
     
       9. The VCO of claim 7, wherein said gate of said FET is connected to said anode of said varactor. 
     
     
       10. The VCO of claim 9, wherein the total length of said gate is approximately 300 microns. 
     
     
       11. The VCO of claim 1, wherein said source and said drain of said FET define a channel region therebetween within said semiconductor layer, and wherein said gate of said FET forms a Schottky barrier with the respect to said channel region. 
     
     
       12. The VCO of claim 11, wherein no pathway for DC return exists between said gate and said source or between said gate and said drain. 
     
     
       13. A monolithic wideband voltage-controlled oscillator (VCO), comprising: an output transistor, said output transistor comprising first, second and third terminals.[., wherein said transistor amplifies across said second and third terminals a signal provided thereto at said first terminal.].;   a first varactor, said varactor being direct current connected to said first terminal of said transistor;   first bias means, connected to said first varactor, for providing a first selected bias voltage thereto;   a second varactor, direct current connected to said second terminal of said transistor;   second bias means, connected to said second varactor for providing a second selected bias voltage thereto; and   first and second RF ground connections, respectively connected to said first and second varactors respectively;   said transistor and said varactors being integrated on a common monocrystalline substrate;   whereby said third terminal of said transistor sustains oscillation.   
     
     
       14. The VCO of claim 13, wherein said first bias means provides said selected voltage to said first varactor for generally matching the frequency of said oscillation at said third terminal of said transistor to a desired frequency;   and wherein said second bias means provides said second selected bias voltage to said second varactor for canceling the phase difference of oscillations at said desired frequency between said second terminal of said transistor and RF ground, to precisely match said oscillation frequency to said desired frequency.   
     
     
       15. The VCO of claim 14, wherein said respective RF ground connections comprises respective capacitors sharing a common layer of metallization. 
     
     
       16. The VCO of claim 14, wherein no pathway for DC return exists between said first and second nor between said first and third terminals of said transistor. 
     
     
       17. The VCO of claim 13, 14, 15 or 16, wherein said transistor and said varactors are all formed atop a common semi-insulating substrate. 
     
     
       18. The VCO of claim 17, wherein said transistor and said respective varactors are all formed within said semiconductor layer atop said substrate. 
     
     
       19. The VCO of claim 18, wherein each said varactor comprises: an anode and a cathode formed on said semiconductor layer, said anode and cathode being coadjacent and spaced apart from each other, said anode forming a Schottky barrier with said semiconductor layer, the portion of said semiconductor layer beneath said anode being sufficiently thin and sufficiently lightly doped that punch through between said anode and said substrate occurs at a lower voltage than does breakdown between said anode and said cathode.   
     
     
       20. The VCO of claim 1, wherein said first terminal of said reactor is at least 2 microns wide. 
     
     
       21. The VCO of claim 1, wherein said first terminal of said reactor is at least 6 times as wide as said semiconducting layer beneath said first terminal is thick. 
     
     
       22. The VCO of claim 1, wherein all of the periphery of said first terminal of said first varactor is co-adjacent to respective corresponding portions of said second terminal said varactor. 
     
     
       23. The VCO of claim 1, wherein said semiconducting layer beneath said first terminal of said varactor is continuous with said semiconducting layer beneath said FET. .Iadd. 
     
     
       24.  A monolithic wideband microwave voltage-controlled oscillator, comprising: (a) a semi-insulating substrate;   (b) a field effect transistor, said field effect transistor with channel in a first doped semiconducting planar region on said substrate;   (c) a varactor, said varactor with anode and cathode on a second doped semiconducting planar region on said substrate, said second region of substantially the same thickness and doping concentration as said first region; and   (d) interconnection between said varactor and said field effect transistor with said varactor a controlled reactive feedback at a first terminal of said transistor. .Iaddend. .Iadd.25. The oscillator of claim 24, further comprising:   (a) a second varactor on said substrate, said second varactor with anode and cathode on a third doped semiconducting planar region on said substrate, said third region of substantially the same thickness and doping concentration as said first region; and   (b) interconnection between said second varactor and said field effect transistor with said second varactor a second controlled reactive feedback at a second terminal of said transistor, said two varactors together controlling the frequency of oscillation. .Iaddend. .Iadd.26. The oscillator of claim 25, wherein:   (a) said second and third regions each have doping and thickness so that for each of said two varactors punchthrough to said substrate occurs at a lower voltage than breakdown between anode and cathode. .Iaddend. .Iadd.27. The oscillator of claim 24, wherein:   (a) said first and second regions are mesas isolated from each other. .Iaddend.