Apparatus and method for measuring the depth of fine engraved patterns

Abstract

An apparatus .Iadd.and method .Iaddend.for measuring in a non-contact manner the depth of pits and grooves formed by etching in periodic patterns on the surface of a substrate. The measurement is based on the detection of the intensity of a diffraction ray excluding that of the 0th order through the irradiation of a light beam with variable wave length to the sample. Whereas, the conventional measuring system is sensitive to a diffraction ray of the 0th order, i.e., the major component of the reflected light, that hampers the detection of a higher order diffraction ray carrying information of the depth.

We claim: 
     
       1. An apparatus for measuring the depth of a fine engraved pattern comprising: means for irradiating a light beam with a variable wavelength to a sample under measurement;   means for detecting a diffraction ray excluding that of the 0th order created on said sample in response to the irradiation by the .[.first mentioned.]. .Iadd.irradiating .Iaddend.means; and   means for calculating the dimension of a pattern engraved in said sample basing on signals produced by the .[.first and second mentioned means.]. .Iadd.irradiating means and the detecting means.Iaddend..   
     
     
       2. An apparatus according to claim 1, wherein said light beam is irradiated to said sample substantially perpendicularly with an allowance of entry angle with respect to the normal being expressed as: ##EQU24## where a denotes the dimension of opening of said pattern and h denotes the design value of the depth of said pattern. 
     
     
       3. An apparatus according to claim 1, wherein said means for irradiating a light beam comprises a spectroscope which provides a signal for identifying the wavelength of said light beam; said detection means comprises a mirror of revolving elipsoidal shape with its focal points being substantially coincident with a measurement point on said sample and a detecting point of said diffraction ray, and a sensor with a diffusion plate for diffusing said diffraction ray entering said measuring point; and said calculation means has an ability of determining the wavelength which provide a peak value in diffraction intensity in response to the irradiation of light beam with a variable wavelength. 
     
     
       4. An apparatus for measuring the depth of a fine engraved pattern comprising: means for irradiating a light beam with a variable wavelength to a sample under measurement;   means for detecting a diffraction ray excluding that of the 0th order created on said sample in response to the irradiation by the .[.first mentioned.]. .Iadd.irradiating .Iaddend.means;   means for calculating the dimension of a pattern engraved in said sample basing on signals produced by the .[.first and second mentioned means.]. .Iadd.irradiating means and the detecting means.Iaddend.; and   means for etching said sample to form said pattern.   
     
     
       5. An apparatus for measuring the depth of a fine engraved pattern comprising: means for irradiating a light beam with a variable wavelength to a sample under measurement;   means for detecting selectivity a high order diffraction ray other than that of the 0th order created on said sample in response to the irradiation by the .[.first mentioned.]. .Iadd.irradiating .Iaddend.means; and   means for calculating the dimension of a pattern engraved in said sample basing on signals produced by the .[.first and second mentioned means.]. .Iadd.irradiating means and the detecting means.Iaddend..   
     
     
       6. An apparatus according to claim 5, wherein said light beam is irradiated to said sample substantially perpendicularly with an allowance of entry angle with respect to the normal being expressed as: ##EQU25## where a denotes the dimension of opening of said pattern, and h denotes the design value of the depth of said pattern. 
     
     
       7. An apparatus according to claim 5, wherein said .[.detection.]. .Iadd.detecting .Iaddend.means comprises an aperture which can be moved in a two-dimensional space. 
     
     
       8. An apparatus according to claim 5, wherein said .[.irradiation.]. .Iadd.irradiating .Iaddend.means comprises a light source which produces a light beam with wavelengths ranging 300-800 nm, a spectroscope having a diffraction grating driven by a stepping motor, and a slit with a slit width d s  for a spectroscopic width Δλ from 3 to 5 nm expressed as: ##EQU26## where L m  denotes the focal distance of the spectroscope, and d g  denotes the pitch of the diffraction grating; said .[.detection.]. .Iadd.detecting .Iaddend.means comprises a stepping motor which drives a reflection mirror for directing a diffraction ray from said sample to a sensor located at a fixed position; said calculation means comprises an analog-to-digital converter, and a processor with abilities of converting a value of wavelength into a reciprocal value of wavelength and calculating the dimension of said pattern from the ordinal number of wavelength corresponding to the peak value of intensity distribution of said diffraction ray. 
     
     
       9. An apparatus according to claim 8, wherein said reflection mirror and sensor in said .[.detection.]. .Iadd.detecting .Iaddend.means and a measurement point on said sample are located substantially on a circle, said reflection mirror having a turning axis located on a perpendicular bisector of a line segment between said measurement point and said sensor. 
     
     
       10. An apparatus according to claim 8, wherein said reflection mirror for directing a diffraction ray from said sample to a fixed position in correspondence to the wavelength λ of a light beam from said irradiation means is turned to an angular position θ expressed as: ##EQU27## where 1 denotes the pitch of pattern engraved in the sample and m denotes the order of the diffraction ray. 
     
     
       11. An apparatus according to claim 8, wherein said stepping motor in said .[.detection.]. .Iadd.detecting .Iaddend.means drives an arm on which said sensor is mounted. 
     
     
       12. An apparatus according to claim 8, wherein said stepping motor in said .[.detection.]. .Iadd.detecting .Iaddend.means drives an arm mounted an end of an optical fiber cord for conducting a diffraction ray to said sensor. 
     
     
       13. An apparatus for measuring the depth of a fine engraved pattern comprising: means for irradiating a light beam with a variable wavelength for detecting selectively a high order diffraction ray other than that of the 0th order created on said sample in response to the irradiation by the .[.first mentioned.]. .Iadd.irradiating .Iaddend.means;   means for calculating the dimension of a pattern engraved in said sample basing on signals produced by the .[.first and second mentioned means.]. .Iadd.irradiating means and the detecting means.Iaddend.; and   means for etching said sample to form said pattern. .Iadd.   
     
     
       14.  An apparatus for measuring the depth of a fine engraved pattern comprising: irradiation means for irradiating a light beam having a variety of wavelengths to a sample under measurement to cause interference;   detection means for detecting an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to the irradiation by the irradiation means;   production means for producing a variation of an intensity of the diffraction ray; and   means for calculating the depth of the pattern engraved in said sample basing on signals produced by the production means and the detection means. .Iaddend. .Iadd.15. An apparatus according to claim 14, wherein said production means includes spectroscopic means for varying the wavelength of the diffraction ray. .Iaddend. .Iadd.16. An apparatus according to claim 15, wherein said irradiation means includes said spectroscopic means. .Iaddend. .Iadd.17. An apparatus according to claim 14, wherein said light beam is irradiated to said sample substantially perpendicularly with an allowance of entry angle with respect to the normal being expressed as:   Δθ<sin.sup.-1 (a/2h),     where a denotes the dimension of opening of said pattern, and h denotes the     
     
     
        design value of the depth of said pattern. .Iaddend. .Iadd.18.  An apparatus according to claim 14, wherein said irradiation means includes a light source which produces the light beam with wavelengths in the range 
     
     
        of 300-800 nm. .Iaddend. .Iadd.19.  An apparatus according to claim 14, wherein said production means includes spectroscopic means disposed 
     
     
        between said sample and said detection means. .Iaddend. .Iadd.20.  An apparatus for measuring the depth of a fine engraved pattern comprising: irradiation means for irradiating a light beam having a variety of wavelengths to a sample under measurement to cause interference;   detection means for detecting an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to the irradiation by the irradiation means;   production means for producing a variation of an intensity of the diffraction ray;   means for calculating the depth of the pattern engraved in said sample basing on signals produced by the production means and the detection means; and   means for etching said sample to form said pattern. .Iaddend. .Iadd.21. An apparatus for measuring the depth of a fine engraved pattern comprising:   irradiation means for irradiating a light beam having a variety of wavelengths to a sample under measurement;   detection means for detecting an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to the irradiation by the irradiation means;   spectroscopic means for producing variable wavelengths of the diffraction ray; and   means for calculating the depth of the pattern engraved in said sample basing on signals produced by the spectroscopic means and the detection   
     
     
        means. .Iaddend. .Iadd.22.  An apparatus according to claim 21, wherein said light beam is irradiated to said sample substantially perpendicularly with an allowance of entry angle with respect to the normal being expressed as:   Δθ<sin.sup.-1 (a/2h),     where a denotes the dimension of opening of said pattern, and h denotes the design value of the depth of said pattern. .Iaddend. .Iadd.23. An apparatus according to claim 21, wherein said irradiation means comprises a light source which produces the light beam with wavelengths in the range of 300-800 nm. .Iaddend. .Iadd.24. An apparatus for measuring the depth of a fine engraved pattern comprising:   irradiation means for irradiating a light beam having a variety of wavelengths to a sample under measurement;   detection means for detecting an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to the irradiation by the irradiation means;   spectroscopic means for producing variable wavelength of the diffraction ray;   means for calculating the depth of the pattern engraved in said sample basing on signals produced by the production means and the detection means; and   
     
     
       means for etching said sample to form said pattern. .Iaddend. .Iadd.25.  A method of measuring the depth of a fine engraved pattern comprising steps of: irradiating by an irradiating means a light beam having a variety of wavelengths to a sample under measurement to cause interference;   detection by a detecting means an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to the irradiating of the light beam; or   producing by a production means a variation of an intensity of the diffraction ray; and   calculating the depth of the pattern engraved in said sample basing on signals produced by the production means and the detection means.   
     
     
        .Iaddend. .Iadd.26.  A method for measuring the depth of a fine engraved pattern comprising steps of: irradiating by an irradiating means a light beam having a variety of wavelengths to a sample under measurement;   detecting by a detecting means an intensity of a diffraction ray excluding the diffraction ray of the 0th order created on said sample in response to irradiating of the light beam;   producing by a spectroscopic means variable wavelengths of the diffraction ray; and   calculating the depth of the pattern engraved in said sample in accordance with signals produced by the spectroscopic means and the detection means.