Tweezers for use with semi-conductor wafers

Abstract

A tweezers for use in the movement of semiconductor wafers can be constructed utilizing upper and lower arms connected to one another in an established manner so that the free or holding ends on such arms may be moved towards one another. In a tweezers as disclosed the holding end of the lower arm includes a flat plate and a shoulder connected to the plate to the remainder of the lower arm and the holding end on the upper arm includes a plurality of separate resilient fingers extending from a support securing these fingers to the remainder of the upper arm. When the plate is inserted beneath an object such as a semiconductor wafer by appropriate manipulation of the arms the fingers can be brought against such an object so as to hold it against the plate. The resilient fingers are not apt to break such an object as it is held on the plate and will accommodate any variation in the height of such an object.

I claim: 
     
       1. A tweezers .Iadd.for handling a rigid, thin fragile object, said tweezers .Iaddend.having upper and lower elongated arms, each of said arms having a mounting end and a holding end, said mounting ends of said arms being located adjacent to one another and being secured to one another in such a manner as to permit said holding ends to be brought toward one another in which the improvement comprises: said holding end of said lower arm includes a flat plate having a front edge, a back edge and side edges connecting said front and back edges and also includes a shoulder connecting said back edge with the remainder of said lower arm, said plate being positioned beneath said lower arm on the side thereof remote from said upper arm by said shoulder,   said holding end of said lower arm also including stop means for limiting the extent to which said plate can be inserted under an object, said stop means being located generally along said back edge of said plate and extending from said back edge generally toward said holding end of said upper arm,   said stop means comprising two tabs extending from said back edge, each of said tabs being located adjacent to a side edge of said plate, .[.said plate being provided with a plurality of perforations extending through said plate, said perforations allowing liquid to drain through said plate.].,   said holding end of said upper arm includes a plurality of separate, resilient fingers spaced from one another and a support holding said fingers and connecting said fingers to the remainder of said upper arm, said fingers curving outwardly and downwardly from said support generally toward .Iadd.and substantially coextensive with .Iaddend.said plate, .Iadd.said fingers having substantially flat terminal ends for broad distribution of forces on a surface of said object, .Iaddend.   said arms being capable of being moved toward one another so that said fingers are capable of independently and resiliently engaging .[.an.]. .Iadd.said .Iaddend.object on said plate generally between said front and rear edges of said plate so as to hold said object on said plate.   
     
     
       2. A tweezers as claimed in claim 1 .[.wherein:.]. .[.each of said fingers includes a terminal end.].,  said terminal ends being located with respect to the remainders of said fingers so as to be parallel to said plate when said arms are moved toward one another so as to hold an object during the use of said tweezers. .Iadd. 3. A tweezer as claimed in claim 1 wherein said flat plate is provided with a plurality of perforations extending through said plate, said perforations allowing liquid to drain through said plate. .Iaddend.