USD984972SActiveUtility

Electrostatic chuck for semiconductor manufacture

85
Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTDPriority: Mar 29, 2021Filed: Sep 17, 2021Granted: May 2, 2023
Est. expiryMar 29, 2041(~14.7 yrs left)· nominal 20-yr term from priority
Inventors:Quanyu Shi
85
PatentIndex Score
14
Cited by
39
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an electrostatic chuck semi conductor manufacture, as shown and described.

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