USD981970SActiveUtility

Substrate mounting plate for substrate processing apparatus

Assignee: KOKUSAI ELECTRIC CORPPriority: Mar 4, 2021Filed: Sep 3, 2021Granted: Mar 28, 2023

Est. expiryMar 4, 2041(~14.6 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a substrate mounting plate for substrate processing apparatus, as shown and described.

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