USD877101SActiveUtility

Target profile for a physical vapor deposition chamber target

90
Assignee: APPLIED MATERIALS INCPriority: Mar 9, 2018Filed: Mar 9, 2018Granted: Mar 3, 2020
Est. expiryMar 9, 2038(~11.6 yrs left)· nominal 20-yr term from priority
Inventors:William JohansonKirankumar Neelasandra SavandaiahPrashant Prabhakar Prabhu
90
PatentIndex Score
31
Cited by
73
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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