USD815385SActiveUtility

Wafer support ring

60
Assignee: ENTEGRIS INCPriority: Oct 13, 2016Filed: Oct 13, 2016Granted: Apr 10, 2018
Est. expiryOct 13, 2036(~10.2 yrs left)· nominal 20-yr term from priority
Inventors:Eric A. Kirkland
60
PatentIndex Score
9
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for a wafer support ring, as shown and described.

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