USD783922SActiveUtility

Wafer support ring

88
Assignee: ENTEGRIS INCPriority: Dec 8, 2014Filed: Dec 8, 2014Granted: Apr 11, 2017
Est. expiryDec 8, 2034(~8.3 yrs left)· nominal 20-yr term from priority
Inventors:Eric A. Kirkland
88
PatentIndex Score
46
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for wafer support ring, as shown and described.

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