USD724551SActiveUtility

Inner tube for process tube for manufacturing semiconductor wafers

Assignee: KANEKO HIROFUMIPriority: Nov 18, 2011Filed: May 10, 2012Granted: Mar 17, 2015

Est. expiryNov 18, 2031(~5.3 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.

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