USD703162SActiveUtility

Wafer holder for stepper

84
Assignee: SUMITOMO ELECTRIC INDUSTRIESPriority: Oct 17, 2012Filed: Mar 13, 2013Granted: Apr 22, 2014
Est. expiryOct 17, 2032(~6.2 yrs left)· nominal 20-yr term from priority
Inventors:Hideto Tamaso
84
PatentIndex Score
30
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer holder for a stepper, as shown and described.

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