USD674366SActiveUtility

Wafer holding member

66
Assignee: TOKYO ELECTRON LTDPriority: Jan 20, 2011Filed: Jun 24, 2011Granted: Jan 15, 2013
Est. expiryJan 20, 2031(~4.5 yrs left)· nominal 20-yr term from priority
Inventors:Hideki Kajiwara
66
PatentIndex Score
14
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for wafer holding member, as shown and described.

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