USD665071SActiveUtility

Deposition chamber liner

Assignee: GOEL ASHISHPriority: Jan 25, 2012Filed: Jan 25, 2012Granted: Aug 7, 2012

Est. expiryJan 25, 2032(~5.5 yrs left)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

The ornamental design for a deposition chamber liner, as shown and described.

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