USD647549SActiveUtility

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

41
Assignee: NGK INSULATORS LTDPriority: Feb 29, 2008Filed: Aug 27, 2008Granted: Oct 25, 2011
Est. expiryFeb 29, 2028(~1.6 yrs left)· nominal 20-yr term from priority
Inventors:Taichi Nakamura
41
PatentIndex Score
4
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.

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