USD643055SActiveUtility

Heater block for use in a semiconductor processing tool

Assignee: ASM JAPANPriority: Sep 11, 2008Filed: Sep 11, 2008Granted: Aug 9, 2011

Est. expirySep 11, 2028(~2.1 yrs left)· nominal 20-yr term from priority

PatentIndex Score

524

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References

Claims

exact text as granted — not AI-modified

I claim the ornamental design for a heater block for use in a semiconductor processing tool, as shown and described.

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