USD623673SActiveUtility

Large area substrate processor

37
Assignee: APPLIED MATERIALS INCPriority: Dec 24, 2008Filed: Dec 24, 2008Granted: Sep 14, 2010
Est. expiryDec 24, 2028(~2.4 yrs left)· nominal 20-yr term from priority
Inventors:Thomas L. DuerJohn A. Miller
37
PatentIndex Score
4
Cited by
12
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a large area substrate processor, as shown and described.

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